US2018082858A1PendingUtilityA1
Carrier ultra thin substrate
Est. expiryNov 6, 2035(~9.3 yrs left)· nominal 20-yr term from priority
H10W 42/276H10W 72/0198H10W 72/29H10W 72/07207H10W 90/726H10W 90/724H10W 72/252H10W 74/117H10W 74/014H10W 70/685H10W 70/05H10W 42/20H10W 20/423H10W 74/019Y10T29/49156H05K 3/4682H01L 24/97H01L 2224/16235H01L 2924/1431H01L 23/49822H01L 24/13H01L 23/3128H01L 2924/1461H01L 23/552H01L 2224/97H01L 21/561H01L 21/568H01L 2224/131H01L 2224/81005H01L 24/16H01L 2224/16245H01L 21/4857H01L 2224/0401H01L 2924/1434H01L 2924/15311H01L 2924/3025H01L 24/81
50
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Claims
Abstract
Method of forming ultra thin coreless substrates are described. In an embodiment, the method utilizes a debond layer including high and low adhesion surface areas to the carrier substrate, and cutting through the low adhesion surface areas to remove a build-up structure from the carrier substrate. An electrical short layer may be formed as a part of or on the debond layer to facilitate electrical testing of the build-up structure prior to debonding, and aid in the formation a “known good” substrate on a support substrate.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A substrate strip comprising:
a support substrate including rectangular lateral dimensions; an adhesive layer on the support substrate; a build-up structure attached to the adhesive layer, the build-up structure comprising a bottom surface including a bottom plurality of contact pads, and a top surface including a top plurality of contact pads.
2 . The substrate strip of claim 1 , wherein the build-up structure is less than 100 μm thick.
3 . The substrate strip of claim 1 , wherein the bottom surface of the build-up structure additionally includes ground routing.
4 . The substrate strip of claim 1 , wherein the build-up structure includes an array of package routings and an array of ground routings arranged in molding groups, arranged such that each package routing includes a ground routing around a periphery of the package routing.
5 . The substrate strip of claim 4 , wherein each molding group contains a plurality of package routings and a plurality of ground routings.
6 . The substrate strip of claim 5 , wherein adjacent package routings within a molding group share a ground routing.
7 . The substrate strip of claim 4 , wherein the array of ground routings is electrically separated from the array of package routings.
8 . The substrate strip of claim 4 , further comprising a barrier metal on the plurality of surface mount contact pads.
9 . The substrate strip of claim 4 , wherein the build-up structure comprises a single metal routing layer.
10 . The substrate strip of claim 4 , wherein the build-up structure comprises one to three metal routing layers.
11 . The substrate strip of claim 4 , wherein each molding group contains a plurality of rows and columns of package routings.
12 . The substrate strip of claim 11 , wherein the molding groups are arranged in single line along a length of the substrate strip.
13 . The substrate strip of claim 4 , wherein a first portion of the bottom plurality of contact pads is in contact with the array of ground routings.
14 . The substrate strip of claim 13 , wherein a second portion of the top plurality of contact pads is in contact with the array of ground routings.
15 . The substrate strip of claim 13 , wherein the bottom plurality of contact pads is a plurality of ball grid array (B GA) contact pads.
16 . The substrate strip of claim 15 , wherein the top plurality of contacts pads is a plurality of surface mount contact pads.
17 . A packaging substrate comprising:
a support substrate; an adhesive layer on the support substrate; a build-up structure attached to the adhesive layer, the build-up structure comprising: a bottom surface including a bottom plurality of contact pads; a top surface including a top plurality of contact pads; and an array of package routings and an array of ground routings arranged in molding groups, arranged such that each package routing includes a ground routing around a periphery of the package routing.
18 . The packaging substrate of claim 17 , wherein each molding group contains a plurality of package routings and a plurality of ground routings.
19 . The packaging substrate of claim 18 , wherein adjacent package routings within a molding group share a ground routing.
20 . The packaging substrate of claim 17 , wherein the array of ground routings is electrically separated from the array of package routings.Join the waitlist — get patent alerts
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