Deposition apparatus

Abstract

A deposition apparatus includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction.

1 . A deposition apparatus, comprising:
 an effusion cell extending in a first direction;   a guide rail below the effusion cell and extending in a second direction intersecting the first direction; and   a cooling channel below an upper surface of the guide rail and extending in the second direction.   
     
     
         2 . The deposition apparatus as claimed in  claim 1 , wherein the cooling channel is in an interior of the guide rail. 
     
     
         3 . The deposition apparatus as claimed in  claim 2 , wherein the guide rail includes a first opening connected to a first end of the cooling channel and a second opening connected to a second end of the cooling channel. 
     
     
         4 . The deposition apparatus as claimed in  claim 3 , wherein:
 the first opening is at a first end of the guide rail in the second direction, and   the second opening is at a second end of the guide rail in the second direction.   
     
     
         5 . The deposition apparatus as claimed in  claim 2 , wherein:
 the first opening and the second opening are at a first end of the guide rail in the second direction, and   the cooling channel includes:   a first extension portion extending from the first opening to a second end of the guide rail, and   a second extension portion bent from the first extension portion, extending to a first end of the guide rail, and connected to the second opening.   
     
     
         6 . The deposition apparatus as claimed in  claim 1 , further comprising:
 a cooler below the guide rail or at a side portion of the guide rail,   wherein the cooling channel is in the cooler.   
     
     
         7 . The deposition apparatus as claimed in  claim 1 , wherein the cooling channel has a substantially helical shape. 
     
     
         8 . The deposition apparatus as claimed in  claim 1 , further comprising:
 a slide between the effusion cell and the guide rail,   wherein a lower surface of the slide faces the guide rail and the upper surface of the guide rail facing the slide are combined with each other.   
     
     
         9 . The deposition apparatus as claimed in  claim 1 , further comprising:
 a lubricating surface on the guide rail.   
     
     
         10 . The deposition apparatus as claimed in  claim 9 , wherein the lubricating surface includes an organic material containing fluoride. 
     
     
         11 . The deposition apparatus as claimed in  claim 1 , further comprising:
 a substrate holder above the effusion cell and on which a target substrate is mounted; and   a mask assembly fixed at a position adjacent to the target substrate.   
     
     
         12 . The deposition apparatus as claimed in  claim 11 , wherein:
 a width of the effusion cell covers a width of the target substrate in the first direction, and   a width of the effusion cell is narrower than a width of the target substrate in the second direction.   
     
     
         13 - 20 . (cancelled)