Method and System for Denser Ultrasonic Transducer Arrays Using Limited Set of Electrical Contacts

Abstract

An ultrasonic transducer and a method for a transmitting an acoustic wave using an ultrasonic transducer comprising a membrane; two or more patterned top electrodes; a pMUT array, wherein the patterned top electrode is arranged as row pin selector and column selector in an N×N array; the pMUT array having N+N electrical contacts; a single unpatterned bottom electrode; a row and column where the electrode is at equal or opposite polarities; and a AC driving voltage is applied to top electrodes with a phase difference of zero or is applied to one electrode to transmit the ultrasonic wave.

1 . An ultrasonic transducer that transmits an acoustic wave comprising:
 a. a membrane;   b. two or more patterned top electrodes;   c. a pMUT array, wherein the patterned top electrode is arranged as row pin selector and column selector in an N×N array;   d. the pMUT array having N+N electrical contacts;   e. a single unpatterned bottom electrode;   f. a row and column where the electrode is at equal or opposite polarities; and   g. a AC driving voltage is applied to top electrodes with a phase difference of zero or is applied to one electrode to transmit the ultrasonic wave.   
     
     
         2 . The ultrasonic transducer of  claim 1 , wherein turning on or off any electrode using a multiplex switch that is selected by the row or column selector address. 
     
     
         3 . The ultrasonic transducer of  claim 1 , wherein arranging 2×2 or more independently actuated transducers forms a 2D beamforming ultrasonic array. 
     
     
         4 . A method for a transmitting an acoustic wave using an ultrasonic transducer, comprising:
 a. arranging a pMUT array having two or more electrodes as a row pin selector and column selector in a N×N array on a membrane;   b. displaying the pMUT array having N+N electrical contacts;   c. aligning a single unpatterned bottom electrode under the member;   d. setting a row and column where the electrode is at equal or opposite polarities;   e. applying an AC driving voltage to top electrodes with a phase difference of zero or is applied to one electrode; and   f. transmitting the ultrasonic wave.   
     
     
         5 . The ultrasonic transducer of  claim 4 , wherein a multiplex switch is used for turning on or off any electrode that is selected by the row or column selector address. 
     
     
         6 . The ultrasonic transducer of  claim 4  forms 2D beamforming ultrasonic array, wherein the 2D beamforming ultrasonic array ranging from 2×2 or more independently actuated transducers.