Leveling additives for electrodeposition

Abstract

Leveling additives, their use in electrodeposition, and regeneration are described. In one embodiment, an electrodeposition bath may include a non-aqueous liquid and an optionally substituted aromatic hydrocarbon. The optionally substituted aromatic hydrocarbon may be protonated.

What is claimed is: 
     
         1 . An electrodeposition bath comprising:
 a non-aqueous liquid; and   an optionally substituted aromatic hydrocarbon.   
     
     
         2 - 5 . (canceled) 
     
     
         6 . The electrodeposition bath of  claim 1 , wherein the optionally substituted aromatic hydrocarbon has a concentration in the electrodeposition bath between or equal to about 0.5 weight percent and 10 weight percent relative to the non-aqueous liquid. 
     
     
         7 . The electrodeposition bath of  claim 1 , wherein the optionally substituted aromatic hydrocarbon is a polymer. 
     
     
         8 . The electrodeposition bath of  claim 1 , wherein a substituent of the optionally substituted aromatic hydrocarbon includes at least one of an alkyl, aryl, and polyalkoxy chain. 
     
     
         9 . (canceled) 
     
     
         10 . A method comprising:
 electrodepositing a material in an electrodeposition bath, wherein the electrodeposition bath includes a non-aqueous liquid and an optionally substituted aromatic hydrocarbon.   
     
     
         11 - 45 . (canceled) 
     
     
         46 . An electrodeposition system comprising:
 an electrodeposition bath including
 a non-aqueous liquid; and 
 an optionally substituted aromatic hydrocarbon; 
   an anode at least partially immersed in the electrodeposition bath; and   a cathode at least partially immersed in the electrodeposition bath.   
     
     
         47 . (canceled)