Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

Abstract

A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.

1 - 13 . (canceled) 
     
     
         14 . A method for manufacturing a micromechanical window structure, comprising:
 providing a substrate, the substrate having a front side and a rear side;   forming a first recess on the front side;   forming a coating on the front side and on the first recess; and   forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.   
     
     
         15 . The method as recited in  claim 14 , wherein the formation of the first recess is carried out in such a way that a recess surface of the first recess has the shape of a plane inclined with respect to the front side. 
     
     
         16 . The method as recited in  claim 15 , wherein the formation of the second recess is carried out in such a way that the coating is precisely exposed on the recess surface. 
     
     
         17 . The method as recited in  claim 14 , wherein the formation of the first recess is carried out using ultrashort pulse lasers. 
     
     
         18 . The method as recited in  claim 14 , wherein the formation of the first recess is carried out by KOH etching. 
     
     
         19 . The method as recited in  claim 14 , wherein the coating is a nitride coating. 
     
     
         20 . The method as recited in  claim 14 , wherein the coating includes a first undercoating and a second undercoating, the first undercoating being a nitride coating and the second undercoating being an oxide coating. 
     
     
         21 . The method as recited in  claim 14 , wherein a moth eye structure is formed on the coating. 
     
     
         22 . The method as recited in  claim 14 , wherein an additional anti-reflection layer is formed on the exposed window area of the coating. 
     
     
         23 . The method as recited in  claim 14 , wherein the formation of the second recess is carried out by at least one of: (i) trench etching, (ii) KOH etching, and (iii) milling. 
     
     
         24 . A micromechanical window structure, comprising:
 a substrate having a front side and a rear side, the substrate including a recess area extending from the front side to the rear side; and   a window, spanning inside the recess area, which is formed by a coating and has a shape of a plane inclined with respect to the front side.   
     
     
         25 . The micromechanical window structure as recited in  claim 24 , wherein the coating is a nitride coating. 
     
     
         26 . The micromechanical window structure as recited in  claim 24 , wherein the coating includes a first undercoating and a second undercoating, the first undercoating being a nitride coating and second undercoating being an oxide coating.