US2018204790A1PendingUtilityA1

Semiconductor device and manufacturing method thereof

Assignee: RENESAS ELECTRONICS CORPPriority: Aug 7, 2015Filed: Mar 12, 2018Published: Jul 19, 2018
Est. expiryAug 7, 2035(~9 yrs left)· nominal 20-yr term from priority
H10W 90/756H10W 90/754H10W 90/732H10W 90/293H10W 90/291H10W 90/24H10W 74/111H10W 74/00H10W 72/5449H10W 72/932H10W 72/884H10W 72/865H10W 70/048H10W 90/00H10W 74/129H10W 74/016H10W 70/465H10W 70/457H10W 70/424H10W 70/421H10W 70/417H10W 70/041H10W 20/497H10W 90/811H01L 2225/06582H01L 23/5227H01L 25/0657H01L 21/4842H01L 2224/48247H01L 2224/49171H01L 21/4825H01L 23/3114H01L 25/50H01L 2224/73265H01L 21/565H01L 2224/48091H01L 23/49541H01L 2224/32145H01L 2225/06531H01L 2924/181H01L 2225/06562H01L 2224/73215H01L 23/49575H01L 23/49548H01L 23/4952H01L 2225/0651H01L 23/49582H01L 23/49513H01L 23/3107
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Claims

Abstract

A manufacturing method of a semiconductor device includes preparing a chip mounting part and a lead frame including leads arranged around the chip mounting part, mounting over the chip mounting part a first semiconductor chip including a first top surface in a quadrangular shape, a first back surface opposite to the first top surface, first pads arranged over the first top surface, and a first inductor that is provided on a side of first top surface and is electrically coupled to the first pads, and mounting over the first semiconductor chip, through a first insulating film, a second semiconductor chip including a second top surface in a quadrangular shape, a second back surface opposite to the second top surface, second pads arranged over the second top surface, and a second inductor that is provided on a side of the second top surface.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A manufacturing method of a semiconductor device, the manufacturing method comprising:
 preparing a chip mounting part and a lead frame including leads arranged around the chip mounting part;   mounting over the chip mounting part a first semiconductor chip including a first top surface in a quadrangular shape, a first back surface opposite to the first top surface, first pads arranged over the first top surface, and a first inductor that is provided on a side of the first top surface and is electrically coupled to the first pads;   mounting over the first semiconductor chip, through a first insulating film, a second semiconductor chip including a second top surface in a quadrangular shape, a second back surface opposite to the second top surface, second pads arranged over the second top surface, and a second inductor that is provided on a side of the second top surface and is electrically coupled to the second pads, the second inductor facing the first inductor; and   electrically coupling each of first leads of the leads to each of the first pads of the first semiconductor chip through a plurality of first wires and electrically coupling each of second leads of the leads to each of the second pads of the second semiconductor chip through a plurality of second wires,   wherein the first pads of the first semiconductor chip are provided along each of a first chip side and a second chip side intersecting with the first chip side among four sides of the first top surface, and   wherein the second semiconductor chip is mounted over the first semiconductor chip in the mounting over the first semiconductor chip such that each of the first pads of the first semiconductor chip is not overlapped with the second semiconductor chip, in a first planar view, viewed from the side of first top surface of the first semiconductor chip, and each of the second pads of the second semiconductor chip is not overlapped with the first semiconductor chip, in a second planar view, viewed from the side of the second top surface of the second semiconductor chip.   
     
     
         2 . The manufacturing method of a semiconductor device according to  claim 1 , wherein the second semiconductor chip is mounted over the first semiconductor chip in the mounting over the first semiconductor chip such that each of the second pads is not overlapped with the chip mounting part.

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