Piezoelectric material, piezoelectric element, and electronic equipment

Abstract

There is provided a lead- and potassium-free piezoelectric material having a high piezoelectric constant and a satisfactory insulation property and a piezoelectric element that includes the piezoelectric material. The piezoelectric material contains a perovskite-type metal oxide having the general formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 (wherein x satisfies 0.80≤x≤0.95, and y satisfies 0.85≤y≤0.95); and at least one rare-earth element selected from La, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu, wherein the rare-earth element content is more than 0 mol % and 5 mol % or less of the amount of perovskite-type metal oxide. The piezoelectric element includes the piezoelectric material.

1 . A piezoelectric material, comprising: a perovskite-type metal oxide having the following general formula (1); and at least one element selected from La, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu, wherein a content of the element is 0.25 mol % or more and 5 mol % or less of the amount of perovskite-type metal oxide
   (Na x Ba 1-y )(Nb y Ti 1-y )O 3   (1)
   
       (wherein x satisfies 0.80≤x≤0.95, and y satisfies 0.85≤y≤0.95). 
     
     
         2 . The piezoelectric material according to  claim 1 , further comprising Cu, wherein the Cu content is more than 0 mol % and 2 mol % or less of the amount of perovskite-type metal oxide. 
     
     
         3 . The piezoelectric material according to  claim 1 , wherein x is smaller than y in the general formula (1). 
     
     
         4 . The piezoelectric material according to  claim 1 , wherein the at least one element is selected from La, Pr, Pm and Tm. 
     
     
         5 . A piezoelectric element, comprising: an electrode portion; and a piezoelectric material portion, wherein the piezoelectric material portion includes the piezoelectric material according to  claim 1 . 
     
     
         6 . A piezoelectric element according to  claim 5 , wherein the piezoelectric material potion and the electrode potion are alternately stacked each another. 
     
     
         7 . The piezoelectric element according to  claim 6 , wherein the electrode potion contains Ag and Pd, and the weight ratio M1/M2 of the weight M1 of Ag to the weight M2 of Pd is in the range of 1.5≤M1/M2≤9.0. 
     
     
         8 . The piezoelectric element according to  claim 6 , wherein the electrode potion contains at least one of Ni and Cu. 
     
     
         9 . A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating portion that includes the piezoelectric element according to  claim 5 . 
     
     
         10 . A liquid discharge apparatus, comprising: a stage configured to receive an object; and the liquid discharge head according to  claim 8 . 
     
     
         11 . An ultrasonic motor, comprising: a vibrating member that includes the piezoelectric element according to claim  5 ; and a moving body in contact with the vibrating member. 
     
     
         12 . An optical apparatus, comprising a drive unit that includes the ultrasonic motor according to  claim 11 . 
     
     
         13 . A vibratory apparatus, comprising a vibrating member that includes the piezoelectric element according to  claim 5  on a diaphragm. 
     
     
         14 . A dust removing device, comprising a vibrating portion including the vibratory apparatus according to  claim 13 . 
     
     
         15 . An image pickup apparatus, comprising: the dust removing device according to  claim 14 ; and an image pickup element unit, wherein the diaphragm of the dust removing device is disposed on the light-receiving surface side of the image pickup element unit. 
     
     
         16 . A piezoelectric acoustic component, comprising the piezoelectric element according to  claim 5 . 
     
     
         17 . Electronic equipment, comprising the piezoelectric element according to  claim 5 .