Apparatus for processing substrate

Abstract

An apparatus for processing a surface of a substrate by subjecting the surface of the substrate to successive surface reactions of at least a first precursor and a second precursor, wherein the apparatus includes at least one nozzle head having two or more precursor nozzles for subjecting the surface of the substrate to at least the first and second precursor, and a moving mechanism for moving the nozzle head in non-linear oscillating movement between a first extreme position and a second extreme position via a centre position. The moving mechanism further includes a first driving mechanism and second driving mechanism connected to the nozzle head and arranged to control in co-operation the non-linear oscillating movement between the first and second extreme positions, and a transmission mechanism arranged between the first and second driving means, wherein the transmission means is connected to the first driving means and second driving means.

1 . An apparatus for processing a surface of a substrate by subjecting the surface of a substrate to successive surface reactions of at least a first precursor and a second precursor, the apparatus comprising:
 at least one nozzle head having two or more precursor nozzles for subjecting the surface of the substrate to at least the first and second precursors; and   a moving mechanism for moving the nozzle head in non-linear oscillating movement between a first extreme position and a second extreme position via a centre position, wherein the moving mechanism further comprises:
 first driving means and second driving means connected to the nozzle head and arranged to control in co-operation the non-linear oscillating movement between the first and second extreme positions, and 
 a transmission means arranged between the first and second driving means, the transmission means being connected to the first driving means and second driving means, and the transmission means being further attached to the nozzle head with attachment means, and 
 wherein the first driving means and the second driving means are arranged to move the transmission means for moving the nozzle head such that the first driving means is arranged to accelerate the nozzle head towards the first extreme position and decelerate the nozzle head towards the second extreme position with the transmission means, and the second driving means is arranged to accelerate the nozzle head towards the second extreme position and decelerate the nozzle head towards the first extreme position with the transmission means. 
   
     
     
         2 . The apparatus according to  claim 1 , wherein the moving mechanism is arranged to move the nozzle head in a circular or rotational oscillating movement around an oscillation axis between the first extreme position and the second extreme position. 
     
     
         3 . The apparatus according to  claim 1 , wherein the first driving means are arranged to accelerate the nozzle head between the second extreme position and the centre position and decelerate the nozzle head between the centre position and the second extreme position, and the second driving means are arranged to accelerate the nozzle head between the first extreme position and the centre position and decelerate the nozzle head between the centre position and the first extreme position. 
     
     
         4 . The apparatus according to  claim 1 , wherein the first driving means comprise at least one first power supply unit providing the accelerating and decelerating power to the nozzle head for maintaining the non-linear oscillating movement of the nozzle head, and the second driving means comprise at least one second power supply unit providing the accelerating and decelerating power to the nozzle head for maintaining the non-linear oscillating movement of the nozzle head. 
     
     
         5 . The apparatus according to  claim 4 , wherein the first and second power supply unit comprise an electric motor, servomotor, spring drive, pneumatic drive, magnetic field drive or a combination of two or more thereof for providing oscillation power to the nozzle head. 
     
     
         6 . The apparatus according to  claim 4 , wherein the first and second power supply units are mechanically and operatively connected directly to the nozzle head with the transmission means. 
     
     
         7 . The apparatus according to  claim 6 , wherein the transmission means comprise one or more belts, lever assemblies, chains or gear wheels. 
     
     
         8 . The apparatus according to  claim 7 , wherein the transmission means are operatively connected between the first and second power supply unit with a first and second drive wheel. 
     
     
         9 . The apparatus according to  claim 7 , wherein the transmission means comprise a metal belt arranged between the first and second driving means and connected to nozzle head. 
     
     
         10 . The apparatus according to  claim 1 , wherein the nozzle head is connected to an oscillation axis with a pendulum rod for forming a pendulum in which the nozzle head is provided as a pendulum mass for moving the nozzle head by oscillating pendulum movement. 
     
     
         11 . The apparatus according to  claim 10 , wherein the oscillation axis is arranged substantially horizontally for moving the nozzle head in pendulum movement against gravitation, or the oscillation axis is arranged substantially vertically for providing a torsion pendulum for moving the nozzle head. 
     
     
         12 . The apparatus according to  claim 10 , wherein the apparatus comprises a transport cylinder having an outer surface along which a flexible elongated substrate is transported, and the nozzle head arranged to move by oscillating pendulum movement at a substantially constant distance from the outer surface of the transport cylinder between the first and second extreme positions. 
     
     
         13 . The apparatus according to  claim 12 , wherein the nozzle head is rotationally supported with the pendulum rod to the central axis of the transport cylinder such that the central axis of the transport cylinder forms the oscillating axis. 
     
     
         14 . The apparatus according to  claim 1 , wherein the moving mechanism is arranged to rotate the nozzle head around a rotation axis by an oscillating rotational movement between the first and second extreme positions. 
     
     
         15 . The apparatus according to  claim 14 , wherein the nozzle head is formed as cylindrical nozzle head having a central axis and substantially circular circumference at a constant distance from central axis, and that the moving mechanism is arranged to rotate the nozzle head around the central axis of the nozzle head by an oscillating rotational movement between the first and second extreme positions.