Sacrificial grating coupler for testing v-grooved integrated circuits

Abstract

Embodiments are directed to a method of forming an optical coupler system. The method includes forming at least one waveguide over a substrate, and forming a sacrificial optical coupler in a first region over the substrate. The method further includes configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide, and forming a v-groove in the first region over the substrate, wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.

What is claimed is: 
     
         1 . An optical coupler system comprising:
 at least one waveguide formed over a substrate; and   a sacrificial optical coupler formed in a first region over the substrate;   wherein the sacrificial optical coupler is configured to couple optical signals to or from the at least one waveguide;   wherein the first region defines an area in which a v-groove will be formed during a subsequent fabrication operation of the optical coupler system.   
     
     
         2 . The system of  claim 1 , wherein the subsequent fabrication operation comprises one or more etch operations. 
     
     
         3 . The system of  claim 1 , wherein the sacrificial optical coupler comprises a sacrificial grating coupler. 
     
     
         4 . The system of  claim 1 , wherein the sacrificial optical coupler is configured to couple optical signals to or from an optical fiber. 
     
     
         5 . The system of  claim 1 , wherein the sacrificial optical coupler is configured to perform a test operation comprising coupling optical signals through the sacrificial optical coupler to or from the at least one waveguide. 
     
     
         6 . The system of  claim 5  further comprising at least one optoelectronic component formed over the substrate. 
     
     
         7 . The system of  claim 6  further comprising the at least one waveguide coupled to the at least one optoelectronic component. 
     
     
         8 . The system of  claims 7 , wherein the test operation further comprises coupling optical signals through the at least one waveguide to or from the at least one optoelectronic component. 
     
     
         9 . The system of  claim 1 , wherein the v-groove is configured to couple optical signals to or from the at least one waveguide. 
     
     
         10 . The system of  claim 9 , wherein an optical fiber is coupled to the v-groove. 
     
     
         11 . The system of  claim 10 , wherein the v-groove is configured to couple optical signals to or from the optical fiber. 
     
     
         12 . The system of  claim 1 , wherein the sacrificial optical coupler comprises fully etched silicon gratings formed in a silicon-on-insulator (SOI) layer. 
     
     
         13 . The system of  claim 1 , wherein the sacrificial optical coupler comprises partially etched gratings formed in a silicon-on-insulator (SOI) layer. 
     
     
         14 . The system of  claim 1 , wherein the sacrificial optical coupler comprises fully etched polysilicon gratings formed in a polysilicon gate layer. 
     
     
         15 . The system of  claim 1 , wherein the sacrificial optical coupler comprises fully etched silicon nitride gratings. 
     
     
         16 . An optical coupler system comprising:
 at least one waveguide formed over a substrate; and   sacrificial gratings formed in a first region over the substrate;   wherein the sacrificial gratings are configured to couple optical signals to or from the at least one waveguide;   wherein the first region defines an area in which a v-groove will be formed during a subsequent fabrication operation of the optical coupler system.   
     
     
         17 . The system of  claims 16 , wherein the subsequent fabrication operation comprises one or more etch operations. 
     
     
         18 . The system of  claim 17 , wherein the v-groove is configured to couple optical signals to or from the at least one waveguide. 
     
     
         19 . The system of  claim 18 , wherein the v-groove is further configured to couple optical signals to or from an optical fiber. 
     
     
         20 . The system of  claim 16  further comprising:
 at least one optoelectronic component formed over the substrate; and 
 the at least one waveguide coupled to the at least one optoelectronic component; 
 wherein the sacrificial gratings are configured to perform a test operation comprising coupling optical signals through the sacrificial gratings to or from the at least one waveguide; 
 wherein the test operation further comprises coupling optical signals through the at least one waveguide to or from the at least one optoelectronic component.