System for trapping polymer vapors in process oven vacuum systems

Abstract

A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.

What is claimed is: 
     
         1 . A bake oven assembly adapted for the drying and imidization of polymer, said bake oven assembly comprising:
 a process chamber, said process chamber comprising a vacuum outlet;   a process chamber vacuum exit line fluidically coupled to said vacuum outlet of said process chamber; and   a polyimide trap assembly, said polyimide trap assembly comprising:
 a trap assembly inlet, said trap assembly inlet fluidically coupled to said process chamber vacuum exit line; 
 a condensation body comprising a condensation chamber, said condensation chamber fluidically coupled to said trap assembly inlet; and 
 a trap assembly outlet, said trap assembly outlet fluidically coupled to said condensation chamber. 
   
     
     
         2 . The bake oven assembly of  claim 1  wherein said condensation body is a cooled condensation body, said cooled condensation body comprises a heat exchanger adapted for heat exchange. 
     
     
         3 . The bake oven assembly of  claim 2  wherein said heat exchanger comprises a plurality of fins adapted for heat exchange, said fins on an exterior surface of said condensation body. 
     
     
         4 . The bake oven assembly of  claim 2  wherein said polyimide trap assembly further comprises a cooling blower adapted to cool said heat exchanger. 
     
     
         5 . The bake oven assembly of  claim 4  wherein said cooling blower is affixed to the exterior of said condenser body. 
     
     
         6 . The bake oven assembly of  claim 1  wherein said trap assembly further comprises:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         7 . The bake oven assembly of  claim 2  wherein said trap assembly further comprises:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         8 . The bake oven assembly of  claim 5  wherein said trap assembly further comprises:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         9 . The bake oven assembly of  claim 1  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         10 . The bake oven assembly of  claim 2  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         11 . The bake oven assembly of  claim 5  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         12 . The bake oven assembly of  claim 9  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         13 . The bake oven assembly of  claim 10  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         14 . The bake oven assembly of  claim 11  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         15 . A polyimide trap assembly, said polyimide trap assembly comprising:
 a trap assembly inlet, said trap assembly inlet fluidically coupled to said process chamber vacuum exit line;   a condensation body comprising a condensation chamber, said condensation chamber fluidically coupled to said trap assembly inlet; and   a trap assembly outlet, said trap assembly outlet fluidically coupled to said condensation chamber.   
     
     
         16 . The polyimide trap assembly of  claim 15  wherein said heat exchanger comprises a plurality of fins adapted for heat exchange, said fins on an exterior surface of said condensation body. 
     
     
         17 . The polyimide trap assembly of  claim 16  further comprising a cooling blower adapted to cool said heat exchanger. 
     
     
         18 . The polyimide trap assembly of  claim 17  wherein said cooling blower is affixed to the exterior of said condenser body. 
     
     
         19 . The polyimide trap assembly of  claim 15  further comprising:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         20 . The bake oven assembly of  claim 16  wherein further comprising:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         21 . The polyimide trap assembly of  claim 17  further comprising:
 a condensed fluid exit coupled to said condensation chamber; and 
 a removable and replaceable fluid reservoir coupled to said condensed fluid exit. 
 
     
     
         22 . The polyimide trap assembly of  claim 15  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         23 . The polyimide trap assembly of  claim 16  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         24 . The polyimide trap assembly of  claim 17  wherein the vertical elevation of said trap assembly inlet is lower than the vertical elevation of said trap assembly outlet. 
     
     
         25 . The polyimide trap assembly of  claim 22  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         26 . The polyimide trap assembly of  claim 23  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         27 . The polyimide trap assembly of  claim 24  wherein the vertical elevation of said condensed fluid exit is lower than the vertical elevation of said trap assembly inlet. 
     
     
         28 . The polyimide trap assembly of  claim 25  wherein said fluid reservoir is a clear reservoir. 
     
     
         29 . The polyimide trap assembly of  claim 26  wherein said fluid reservoir is a clear reservoir. 
     
     
         30 . The polyimide trap assembly of  claim 27  wherein said fluid reservoir is a clear reservoir. 
     
     
         31 . A method for trapping vapors released during imidization processes, said method comprising the steps of:
 pulling vapor out of a process chamber using the negative pressure differential of a vacuum source via a chamber exit vacuum line;   cooling said vapor in a condensation chamber; and   capturing liquefied vapors in a trap coupled to said condensation chamber.   
     
     
         32 . The method of  claim 31  wherein said step of capturing liquefied vapors in a trap comprises capturing said liquefied vapors in an easily removable and replaceable reservoir. 
     
     
         33 . The method of  claim 32  wherein said reservoir is clear and allows for external observation of its level of fullness.