Image sensor structure

Abstract

An image sensor structure is provided, which includes a substrate, a color filter and an infrared filter. The substrate has a first sensing, region for detecting visible light and a second sensing region neighboring the first sensing region for detecting infrared light. The color filter is vertically above the first sensing region. The infrared filter is vertically above the second sensing region and neighbors the color filter, in which one or more openings are defined for penetrating incident light.

1 . An image sensor structure, comprising:
 a substrate having a first sensing region for detecting visible light and a second sensing region neighboring the first sensing region for detecting infrared light;   a color filter vertically above the first sensing region; and   a first infrared filter vertically above the second sensing region and neighboring the color filter, wherein the first infrared filter comprises a photo-type material, and wherein the first infrared filter defines one or more openings for penetrating incident light.   
     
     
         2 . The image sensor structure of  claim 1 , wherein a length and a width of each of the one or more openings are substantially equal to or less than 400 nm. 
     
     
         3 . The image sensor structure of  claim 1 , wherein the first infrared filter has a grid shape that defines the one or more openings. 
     
     
         4 . The image sensor structure of  claim 1 , wherein the first infrared filter is an infrared pass filter. 
     
     
         5 . The image sensor structure of  claim 1 , further comprising:
 a second infrared filter on the first sensing region;   a third infrared filter on the second sensing region and neighboring the second infrared filter; and   a planarization layer over the second infrared filter and the third infrared filter and below the color filter and the first infrared filter.   
     
     
         6 . The image sensor structure of  claim 5 , wherein the second infrared filter is an infrared cutoff filter. 
     
     
         7 . The image sensor structure of  claim 5 , wherein the third infrared filter is a white filter. 
     
     
         8 . The image sensor structure of  claim 5 , wherein the third infrared filter is an infrared pass filter. 
     
     
         9 . The image sensor structure of  claim 1 , further comprising:
 a spacer layer over the color filter and the first infrared filter and filling the one or more openings; and   a microlens layer on the spacer layer.   
     
     
         10 . The image sensor structure of  claim 1 , wherein the color filter comprises a red light filtering portion, a blue light filtering portion and a green light filtering portion. 
     
     
         11 . The image sensor structure of  claim 1 , further comprising:
 at least a color photodiode in the first sensing region of the substrate; and   an infrared photodiode in the second sensing region of the substrate.   
     
     
         12 - 20 . (canceled)