Heat treatment apparatus

Abstract

A heat treatment apparatus includes: a heat exchange unit including a plurality of first channels and a plurality of second channels; a space-forming part having a space facing channel openings of the respective first channels; a first opening located in the space-forming part and having a first aperture; a flow-regulating part installed in the space in the space-forming part to regulate a flow of the first fluid; and an attachment part for removably attaching the flow-regulating part through the first aperture, wherein the space in the space-forming part is a space in which first fluid led out of the respective channel openings flows together, or a space from which the first fluid flowing together is introduced to the respective channel openings, and in a state in which the flow-regulating part is fixed in the space-forming part, the flow-regulating part is opposed to the plural channel openings.

What is claimed is: 
     
         1 . A heat treatment apparatus using heat exchange between a first fluid and a second fluid, the apparatus comprising:
 a heat exchange unit including a plurality of first channels through which the first fluid flows and a plurality of second channels through which the second fluid flows;   a space-forming part having a space facing channel openings of the respective first channels;   a first opening located in the space-forming part and having a first aperture;   a flow-regulating part installed in the space in the space-forming part to regulate a flow of the first fluid; and   an attachment part for removably attaching the flow-regulating part through the first aperture,   wherein the space in the space-forming part is a space in which the first fluid led out of the respective channel openings flows together, or a space from which the first fluid flowing together is introduced to the respective channel openings, and   in a state in which the flow-regulating part is fixed in the space-forming part, the flow-regulating part is opposed to the plural channel openings.   
     
     
         2 . The heat treatment apparatus according to  claim 1 , wherein an extending direction of a central axis of the first aperture is different from an open direction of the respective channel openings. 
     
     
         3 . The heat treatment apparatus according to  claim 1 , wherein the flow-regulating part has a cylindrical shape. 
     
     
         4 . The heat treatment apparatus according to  claim 1 , wherein the flow-regulating part is a porous member provided with a plurality of holes through which the first fluid can flow. 
     
     
         5 . The heat treatment apparatus according to  claim 1 , wherein the first opening includes a first connection part connected to and released from an external pipe outside the apparatus through which the first fluid flows. 
     
     
         6 . The heat treatment apparatus according to  claim 5 , wherein:
 the attachment pan includes an engaging part integrally provided at one end of the flow-regulating part so as to have a length from a central axis of the flow-regulating part greater than a radius of the first aperture, and an engaged part provided in the first connection part and engaged with the engaging part; and   in a state in which the engaging part engages with the engaged part, the first connection part is connected to the external pipe outside the apparatus so as to fix the flow-regulating part.   
     
     
         7 . The heat treatment apparatus according to  claim 1 , further comprising:
 a second opening including a first connection part connected to and released from an external pipe outside the apparatus through which the first fluid flows; and   a shielding plate capable of shielding the first aperture,   wherein the first opening includes a second connection pan connected to and released from the shielding plate.   
     
     
         8 . The heat treatment apparatus according to  claim 7 , wherein:
 the attachment part includes an engaging part integrally provided at one end of the flow-regulating part so as to have a length from a central axis of the flow-regulating part greater than a radius of the first aperture, and an engaged part provided in the second connection part and engaged with the engaging part; and   in a state in which the engaging part engages with the engaged part, the second connection part is connected to the shielding part so as to fix the flow-regulating part.   
     
     
         9 . The heat treatment apparatus according to  claim 7 , wherein:
 the first opening is opposed to the second opening on an identical axis; and   another end of the flow-regulating part is introduced into a second aperture of the second opening in the state in which the flow-regulating part is fixed in the space-forming part.