DEPOSITION OF LiCoO2

Abstract

In accordance with the present invention, deposition of LiCoO2 layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2 with a desired <101> or <003> orientation. Some embodiments of the deposition address the need for high rate deposition of LiCoO2 films, which can be utilized as the cathode layer in a solid state rechargeable Li battery, Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the LiCoO2 layer.

1 - 46 . (canceled) 
     
     
         47 . A method of making a battery, comprising: depositing a first conducting layer over a substrate; depositing a first crystalline LiCoO.sub.2 layer over the first conducting layer by applying pulsed DC power to a densified conductive ceramic LiCoO.sub.2 sputter target that includes at least one dopant of Ni, Si, or Nb, the deposited first crystalline LiCoO.sub.2 layer having a columnar structure; depositing a first LiPON (Li.sub.xPO.sub.yN.sub.z) layer over the first crystalline LiCoO.sub.2 layer; depositing a first anode layer over the first LiPON (Li.sub.xPO.sub.yN.sub.z) layer; and depositing a second conducting layer over the first anode layer. 
     
     
         48 . The method of  claim 47 , further comprising: depositing a stacked battery over the second conducting layer in a parallel arrangement, wherein the parallel arrangement includes: depositing a second anode layer over the second conducting layer; depositing a second LiPON (Li.sub.xPO.sub.yN.sub.z) layer over the second anode layer; and depositing a second crystalline LiCoO.sub.2 layer over the second LiPON (Li.sub.xPO.sub.yN.sub.z) layer. 
     
     
         49 . The method of  claim 47 , further comprising: depositing a stacked battery over the second conducting layer in a series arrangement, wherein the series arrangement includes: depositing a second crystalline LiCoO.sub.2 layer over the second conducting layer; depositing a second LiPON (Li.sub.xPO.sub.yN.sub.z) layer over the second crystalline LiCoO.sub.2 layer; and depositing a second anode layer over the second LiPON (Li.sub.xPO.sub.yN.sub.z) layer. 
     
     
         50 . The method of  claim 47 , further comprising: preheating the substrate to a temperature of about 200.degree.C. 
     
     
         51 . The method of  claim 47 , further comprising: depositing a lift-off layer between the substrate and the bottom conducting layer, the lift-off layer including one or more materials selecting from the group consisting of polyimide, CaF.sub.2, and carbon; and lifting off the battery from the substrate using one or more processes selected from the group consisting of applying oxidation, heat, light, and a combination thereof to the lift-off layer. 
     
     
         52 . The method of  claim 47 , wherein depositing the crystalline LiCoO.sub.2 layer includes: flowing a gaseous mixture including argon and oxygen through a chamber for depositing the crystalline LiCoO.sub.2; applying the pulsed DC power to the densified conductive ceramic LiCoO.sub.2 sputter target; applying an RF bias power to the substrate; filtering the RF bias power with a narrow-band rejection filter from coupling into the pulsed DC power; and depositing the crystalline LiCoO.sub.2 layer having the columnar structure, wherein the densified conductive ceramic LiCoO.sub.2 sputter target has a resistivity in a range from about 3 k.OMEGA, to about 10 k.OMEGA. 
     
     
         53 - 56 . (canceled)