Nano-sensor array

Abstract

In one embodiment, a method is provided for the manufacture of a nano-sensor array. A base having a sensing region is provided along with a plurality of nano-sensors. Each of the plurality of nano-sensors is formed by: forming a first nanoneedle along a surface of the base, forming a dielectric on the first nanoneedle, and forming a second nanoneedle on the dielectric layer. The first nanoneedle of each sensor has a first end adjacent to the sensing region of the base. The second nanoneedle is separated from the first nanoneedle by the dielectric and has a first end adjacent the first end of the first nanoneedle. The base is provided with a fluidic channel. The plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends proximate the fluidic channel to facilitate sensing of targeted matter in the fluidic channel.

1 .- 3 . (canceled) 
     
     
         4 . A method for sensing, comprising:
 (a) providing a sensor array including a plurality of sensors, wherein a sensor of said plurality of sensors includes a first electrode and a second electrode adjacent to a base, wherein said first electrode and said second electrode are separated by a dielectric and include ends that are adjacent to one another, and wherein said first electrode and said second electrode are disposed in different planes relative to a surface of said base;   (b) flowing a species through a channel in fluid communication with said ends of said first electrode and said second electrode of said sensor; and   (c) using a detection circuit coupled to said sensor to detect a local change in a signal within a sensing region adjacent to said ends of said first electrode and said second electrode, wherein said local change in said signal is indicative of a presence of said species within said sensing region.   
     
     
         5 . The method of  claim 4 , wherein said local change in said signal is a change in local ion concentration. 
     
     
         6 . The method of  claim 4 , wherein said local change in said signal is a change in local impedance. 
     
     
         7 . The method of  claim 4 , wherein said local change in said signal is a change in local conductivity. 
     
     
         8 . The method of  claim 4 , wherein said sensing region is disposed within a double layer of said ends of said first electrode and said second electrode. 
     
     
         9 . The method of  claim 4 , wherein said dielectric varies in thickness such that a portion of said dielectric disposed adjacent to said ends of said first electrode and said second electrode is thinner than another portion of said dielectric disposed away from said end of said first electrode and said second electrode. 
     
     
         10 . The method of  claim 4 , wherein said dielectric further comprises a probe that binds said species. 
     
     
         11 . The method of  claim 4 , wherein said first electrode or said second electrode further comprise a probe that binds said species. 
     
     
         12 . The method of  claim 4 , wherein said sensor further comprises a passivation layer or oxidation layer, and wherein said passivation layer or said oxidation layer reduces a surface area of said first electrode and said second electrode exposed to said species. 
     
     
         13 . The method of  claim 4 , wherein said species is a nucleic acid molecule. 
     
     
         14 . A sensing device, comprising:
 a sensor array including a plurality of sensors, wherein a sensor of said plurality of sensors comprises a first electrode and a second electrode adjacent to a base, wherein said first electrode and said second electrode are separated by a dielectric and includes ends that are adjacent to one another, and wherein said first electrode and said second electrode are in different planes relative to a surface of said base;   a channel in fluid communication with said ends of said first electrode and said second electrode, wherein said channel is configured to flow a species; and   a detection circuit coupled to said sensor, wherein said detection circuit detects a local change in a signal within a sensing region adjacent to said ends of said first electrode and said second electrode, wherein said local change in said signal is indicative of a presence of said species within said sensing region.   
     
     
         15 . The device of  claim 14 , wherein said local change in said signal is a change in local ion concentration. 
     
     
         16 . The device of  claim 14 , wherein said local change in said signal is a change in local impedance. 
     
     
         17 . The device of  claim 14 , where said local change in said signal is a change in local conductivity. 
     
     
         18 . The device of  claim 14 , wherein said sensing region is disposed within a double layer of said ends of said first electrode and said second electrode. 
     
     
         19 . The device of  claim 14 , wherein said dielectric varies in thickness such that a portion of said dielectric disposed adjacent to said ends of said first electrode and said second electrode is thinner than another portion of said dielectric disposed away from said end of said first electrode and said second electrode. 
     
     
         20 . The device of  claim 14 , wherein said dielectric further comprises a probe that binds to said species. 
     
     
         21 . The device of  claim 14 , wherein said first electrode or said second electrode further comprises a probe that binds to said species. 
     
     
         22 . The device of  claim 14 , wherein said sensor further comprises a passivation layer or oxidation layer, and wherein said passivation layer or said oxidation layer reduces a surface area of said first electrode and said second electrode exposed to said species. 
     
     
         23 . The device of  claim 14 , wherein said species is a nucleic acid molecule.