Imaging device, pixel and manufacturing method thereof

Abstract

The present disclosure relates to an imaging device, a pixel and a method thereof. The imaging device comprises: a pixel array, which comprises multiple pixels arranged in rows and columns, wherein at least one pixel comprises multiple subpixels, and the multiple subpixels share one floating diffusion region; and a control circuit, which controls the pixel array; wherein the control circuit reads the multiple subpixels one by one under the rolling shutter state, and reads the multiple subpixels simultaneously under the global shutter state.

What is claimed is: 
     
         1 . An imaging device, comprising:
 a pixel array, which comprises a plurality of pixels arranged in rows and columns, wherein at least one pixel comprises a plurality of subpixels which share a floating diffusion region; and   a control circuit, which controls the pixel array;   wherein the control circuit reads the plurality of subpixels in turn under the rolling shutter state and reads the plurality of subpixels simultaneously under the global shutter state.   
     
     
         2 . The imaging device of  claim 1 , wherein the plurality of subpixels have the same color. 
     
     
         3 . The imaging device of  claim 1 , wherein each of the plurality of subpixels is controlled by an independent transfer signal. 
     
     
         4 . The imaging device of  claim 3 , further comprising:
 a first capacitor coupled to the floating diffusion region to store a photosensitive signal under the global shutter state; and   a second capacitor coupled to the floating diffusion region to store a reset signal under the global shutter state.   
     
     
         5 . The imaging device of  claim 1 , further comprising an output transistor controlled by a bias signal, wherein the output transistor is coupled to a column output line under the rolling shutter state and is grounded under the global shutter state. 
     
     
         6 . The imaging device of  claim 5 , wherein the bias signal functions as a selection signal under the rolling state and the bias signal controls the off-and-on states of the output transistor under the global state. 
     
     
         7 . The imaging device of  claim 1 , wherein the at least one subpixel of the plurality of subpixels comprises a sensing layer, an intra-pixel interconnection layer, and a circuit layer. 
     
     
         8 . The imaging device of  claim 7 , wherein the sensing layer comprises a photodiode, a transfer gate, and a floating diffusion region; the circuit layer comprises a reset unit, a source follower, a row selector, a first capacitor, and a second capacitor; the floating diffusion region is electrically coupled to the reset gate and the source following gate by the electrical channel of the intra-pixel interconnection layer. 
     
     
         9 . The imaging device of  claim 7 , wherein the sensing layer comprises a photodiode, a transfer gate, a floating diffusion region, a reset unit, and a source follower; the circuit layer comprises a row selector, a first capacitor, and a second capacitor; the source following gate is electrically coupled to the first capacitor and the second capacitor by the electrical channel of the intra-pixel interconnection layer. 
     
     
         10 . A pixel comprising a plurality of subpixels, and at least one subpixel comprising:
 a sensing chip, which comprises a photodiode and a transfer transistor;   a logic chip, which is under the sensing chip, and   an electrical connection channel, which couples the sensing chip and the logic chip;   wherein the multiple photodiodes of the multiple subpixels are read in turn under the rolling shutter state, and the multiple photodiodes of the multiple subpixels are read simultaneously under the global shutter state.   
     
     
         11 . The pixel of  claim 10 , wherein each of the multiple subpixels is controlled by an independent transfer signal. 
     
     
         12 . The pixel of  claim 10 , further comprising:
 a first capacitor which is used to couple to the floating diffusion region to store a photosensitive signal under the global shutter state; and   a second capacitor which is used to couple to the floating diffusion region to store a reset signal under the global shutter state.   
     
     
         13 . The pixel of  claim 10 , further comprising an output transistor controlled by a bias voltage signal, wherein the output transistor is coupled to a column output line under the rolling shutter state and is grounded under the global shutter state. 
     
     
         14 . The pixel of  claim 13 , wherein the output transistor is controlled by a bias signal, wherein the bias signal functions as a selection signal under the rolling state, and under the global state, the bias signal controls the off-and-on states of the output transistor. 
     
     
         15 . The pixel of  claim 10 , wherein the sensing chip comprises a floating diffusion region, the logic chip comprises a reset transistor, a source following transistor, a row selection transistor, a first capacitor, and a second capacitor; the floating diffusion region is electrically coupled to the reset transistor and the source following transistor by the electrical connection channel. 
     
     
         16 . The pixel of  claim 10 , wherein the sensing chip comprises a floating diffusion region, a reset transistor, and a source following transistor, the logic chip comprises a row selection transistor, a first capacitor, and a second capacitor; the source following transistor is electrically coupled to the first capacitor and the second capacitor by the electrical connection channel. 
     
     
         17 . A method of operating an imaging device, comprising:
 in response to the rolling shutter state, reading a plurality of subpixels in turn, wherein the plurality of subpixels share a floating diffusion region; and   in response to the global shutter state, reading the plurality of subpixels simultaneously.   
     
     
         18 . The method of  claim 17 , wherein the plurality of subpixels have the same color. 
     
     
         19 . The method of  claim 17 , wherein each of the plurality of subpixels is controlled by an independent transfer signal. 
     
     
         20 . The method of  claim 17 , wherein the plurality of subpixels belong to a pixel.