Surface plate for finish polishing, finish polishing device, and polishing method

Abstract

Provided is a finish polishing surface plate configured such that a polishing film is mounted thereon. The finish polishing surface plate includes a plate body having a planar surface; and a plurality of island shaped protrusions formed on the surface of the plate body. In the plurality of island shaped protrusions, continuous grooved recesses are formed between the respective island shaped protrusions.

1 . A finish polishing surface plate configured such that a polishing film is mounted thereon, the plate comprising:
 a plate body which has a planar surface; and   a plurality of island shaped protrusions which is formed on the surface of the plate body,   wherein in the plurality of island shaped protrusions, continuous grooved recesses are formed between the respective island shaped protrusions.   
     
     
         2 . The finish polishing surface plate according to  claim 1 ,
 wherein a diameter dimension of the island shaped protrusions is set within a range of 1.5 to 2.5 times a width dimension of the grooved recesses.   
     
     
         3 . The finish polishing surface plate according to  claim 1 ,
 wherein the island shaped protrusions adjacent to each other are arranged such that a separation distance therebetween is equal to the width dimension of the grooved recesses on the whole surface of the plate body.   
     
     
         4 . The finish polishing surface plate according to  claim 1 ,
 wherein each of the island shaped protrusions has a polygonal shape in plan view.   
     
     
         5 . The finish polishing surface plate according to  claim 1 ,
 wherein a diameter dimension of the island shaped protrusions is set within a range of ½ to 3/2 with respect to a diameter dimension of a polishing target surface of a polishing sample.   
     
     
         6 . The finish polishing surface plate according to  claim 1 ,
 wherein a polishing target surface of a polishing sample has regions having different hardnesses, and a Mohs hardness difference between a high-hardness region and a low-hardness region in the polishing target surface is 3 or more.   
     
     
         7 . A finish polishing device comprising:
 the finish polishing surface plate according to  claim 1 ; and   a rotating device that rotates the finish polishing surface plate with respect to a rotational axis orthogonal to the surface of the plate body.   
     
     
         8 . The finish polishing device according to  claim 7 ,
 wherein the rotating device has a rotating plate that rotates around the rotational axis, and a holding part that holds the finish polishing surface plate to the rotating plate.   
     
     
         9 . The finish polishing device according to  claim 8 ,
 wherein the finish polishing surface plate is formed of stainless steel having magnetism, and   wherein the holding part is capable of magnetizing the finish polishing surface plate.   
     
     
         10 . A polishing method using the finish polishing device according to  claim 1 , the method comprising:
 performing polishing using a planar surface plate and polishing abrasive grains to generate edge sagging in a polishing sample; and   performing polishing using the finish polishing device and a polishing film to eliminate the edge sagging to flatten the polishing target surface of the polishing sample.   
     
     
         11 . The polishing method according to  claim 10 ,
 wherein the polishing abrasive grains are alumina paste.   
     
     
         12 . The finish polishing surface plate configured such that a polishing film is mounted thereon, wherein
 a diameter dimension of the island shaped protrusion is set within a range of 8 to 20 mm or 2 to 8 mm, and a diameter dimension of the grooved recesses is ½ of the diameter dimension of the island shaped protrusion.