Photoelectric conversion device and manufacturing method and apparatus thereof

Abstract

The present embodiments provide a photoelectric conversion device having a laminate structure of a substrate, a transparent electrode, an active layer, and a counter electrode, stacked in this order. In the device, a cavity is provided on the counter electrode-side. The cavity penetrates through the counter electrode and has an opening area larger in the counter electrode than in the active layer.

1 . A photoelectric conversion device having a laminate structure of
 a substrate,   a transparent electrode,   an active layer, and   a counter electrode, stacked in this order; and also having a cavity provided on the counter electrode-side, wherein   said cavity penetrates through the counter electrode,   said cavity has an opening area larger in said counter electrode than in said active layer.   
     
     
         2 . The device according to  claim 1 , wherein said substrate is not exposed to the bottom of said cavity. 
     
     
         3 . The device according to  claim 1 , wherein said transparent electrode is exposed to the bottom of said cavity. 
     
     
         4 . The device according to  claim 1 , which further comprises an intermediate layer placed between the active layer and the transparent electrode or between the active layer and the counter electrode. 
     
     
         5 . The device according to  claim 1 , wherein the opening area in said counter electrode is 4 mm 2  or less. 
     
     
         6 . The device according to  claim 1 , wherein said substrate is made of flexible organic material. 
     
     
         7 . The device according to  claim 6 , wherein said organic material is selected from the group consisting of polyethylene naphthalate, polyethylene terephthalate, polyethylene, polyimide, polyamide, polyamide-imide, polyester, polycycloolefin and liquid crystal polymer. 
     
     
         8 . The device according to  claim 1 , wherein said active layer contains a perovskite compound. 
     
     
         9 . The device according to  claim 1 , wherein said active layer has a heterojunction or bulkheterojunction structure comprising an organic substance. 
     
     
         10 . The device according to  claim 1 , which furthermore comprises a sealing layer placed on said counter electrode. 
     
     
         11 . The device according to  claim 10 , wherein said cavity is inlaid with said sealing layer. 
     
     
         12 . The device according to  claim 1 , which serves as one selected from the group consisting of solar cells, light-emitting devices, photosensors, photodiodes and optical memories. 
     
     
         13 . A photovoltaic module in which a plural number of the devices according to  claim 1  are arranged. 
     
     
         14 . A method for manufacturing a photoelectric conversion device, comprising the steps of:
 forming a laminate structure of   a substrate,   a transparent electrode,   an active layer produced by wet-coating, and   a counter electrode, stacked in this order; and thereafter   (a) pressing an adhesive material just against a defect formed on the surface of said counter electrode, and then peeling off said adhesive material together with said defect and the peripheral part thereof; or   (b) sucking a defect formed on the surface of said counter electrode, so as to remove said defect and the peripheral part thereof.   
     
     
         15 . An apparatus for manufacturing the device according to  claim 1 , equipped with
 a defect-position determining unit with which positions of defects are determined, and   a defect-removing unit with which said defects are removed.