Hybrid material post-cmp brushes and methods for forming the same

Abstract

Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.

What are claimed: 
     
         1 . A hybrid brush for cleaning a surface, comprising:
 a mandrel;   a molded first layer formed about the mandrel, wherein the molded first layer comprises a first material; and   a second layer molded about the molded first layer, wherein the molded second layer comprises a second material.   
     
     
         2 . The hybrid brush of  claim 1 , wherein the molded first layer compresses under less force than the molded second layer. 
     
     
         3 . The hybrid brush of  claim 1 , wherein the molded first layer does not comprise a starch templating agent and the molded second layer comprises a starch templating agent. 
     
     
         4 . The hybrid brush of  claim 1 , wherein a respective outer surface of one or both of the molded first layer and the molded second layer is substantially free of protrusions. 
     
     
         5 . The hybrid brush of  claim 1 , wherein the first material comprises a first polyvinyl acetate formulation and the second material comprises a second polyvinyl acetate formulation. 
     
     
         6 . The hybrid brush of  claim 1 , wherein a force to compress the molded first layer is substantially the same when the molded first layer is dry as when it is wet with a cleaning fluid used for cleaning the surface. 
     
     
         7 . The hybrid brush of  claim 1 , wherein a first pore distribution for the molded first layer is different than a second pore distribution for the molded second layer. 
     
     
         8 . The hybrid brush of  claim 1 , wherein a thickness of the molded first layer is independent of the thickness of the molded second layer. 
     
     
         9 . The hybrid brush of  claim 1 , further comprising a third layer between the molded first layer and the molded second layer. 
     
     
         10 . A method for forming a hybrid brush for cleaning a surface, comprising:
 placing a mandrel in a first mold;   forming a first layer around the mandrel by injecting a first material into the first mold;   removing the mandrel with the first layer from the first mold;   placing the mandrel with the first layer into a second mold; and   forming the second layer surrounding the first layer by injecting a second material into the second mold.   
     
     
         11 . The method of  claim 10 , further comprising forming a third layer surrounding the first layer, prior to forming the second layer. 
     
     
         12 . The method of  claim 10 , wherein the first mold forms depressions on an outer surface of the first layer. 
     
     
         13 . The method of  claim 12 , wherein a first cross-section area of each of the depressions at an outer surface of the first layer is smaller than a second cross-section area of each of the depressions below the outer surface of the first layer. 
     
     
         14 . The method of  claim 10 , wherein the first layer compresses with less force than the second layer. 
     
     
         15 . The method of  claim 10 , wherein the first material does not comprise polyvinyl acetate formulation. 
     
     
         16 . The method of  claim 10 , wherein the second material comprises a starch templating agent. 
     
     
         17 . The method of  claim 10 , wherein the first material does not comprise a starch templating agent. 
     
     
         18 . The method of  claim 10 , wherein the first layer comprises larger pores than the second layer. 
     
     
         19 . The method of  claim 10 , comprising treating the first layer, after removing the mandrel and the first layer from the first mold, prior to putting the mandrel and the first layer into the second mold. 
     
     
         20 . The method of  claim 10 , wherein a respective outer surface of one or both of the first layer and the second layer is substantially free of protrusions.