Compact deflecting magnet

Abstract

A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.

1 - 21 . (canceled) 
     
     
         22 . A magnet comprising:
 a yoke having a set of four faces and a set of four corners;   a first set of four coils, each wound, respectively, on the set of four faces; and   a second set of four coils, each wound, respectively, on the set of four corners.   
     
     
         23 . The magnet of  claim 22 , the second set of four coils electrically connected to each other to provide a quadrupole magnetic field in response to a current in the second set of four coils. 
     
     
         24 . The magnet of  claim 23 , the yoke having an exit side with an arcuate contour. 
     
     
         25 . The magnet of  claim 24 , wherein a pair of faces in the set of four faces have the arcuate contour at the exit side. 
     
     
         26 . The magnet of  claim 25 , the pair of faces parallel to each other. 
     
     
         27 . The magnet of  claim 26 , wherein the yoke is horn-shaped. 
     
     
         28 . The magnet of  claim 22 , the yoke having an exit side with an arcuate contour. 
     
     
         29 . The magnet of  claim 22 , the yoke comprising two parts attached together. 
     
     
         30 . The magnet of  claim 29 , a first part of the two attached parts including a first part of a face, a second part of the two attached parts including a second part of the face, wherein a coil in the first set of coils wound on the face comprises:
 a first part coil wound on the first part of the face; and   a second part coil wound on the second part of the face, the second part coil electrically connected to the first part coil to form the coil.   
     
     
         31 . The magnet of  claim 22 , the yoke comprising mu-metal. 
     
     
         32 . A system comprising:
 a beam tube system;   a magnet attached to the beam tube system, the magnet comprising:
 a yoke having a set of four faces and a set of four corners; 
 a first set of four coils, each wound, respectively, on the set of four faces; and 
 a second set of four coils, each wound, respectively, on the set of four corners; and 
   a particle beam source to emit electrons, the magnet attached to the beam tube system to deflect the emitted electrons in response to a current in the first set of four coils.   
     
     
         33 . The system of  claim 32 , the yoke having an exit side with an arcuate contour, the magnet to provide a converging lens for the emitted electrons in response to a current in the first set of four coils. 
     
     
         34 . The system of  claim 32 , the magnet having a window frame design to deflect the emitted electrons in a first plane and a second plane in response to a current in the first set of four coils. 
     
     
         35 . The system of  claim 34 ,
 the yoke having an exit side with an arcuate contour;   the magnet to provide a converging lens for the emitted electrons in the first and second planes in response to a current in the first set of four coils; and   the second set of four coils electrically connected to each other to provide a quadrupole magnetic field in response to a current in the second set of four coils.   
     
     
         36 . The system of  claim 32 , the yoke comprising mu-metal.