Manufacturing device for light emitting element

Abstract

Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.

What is claimed is: 
     
         1 . A manufacturing device for a light emitting element, the manufacturing device comprising:
 a main transporting route extending in a first direction, the main transporting route including first and second transfer devices connected to each other through a first transporting chamber;   a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route including a second transporting chamber connected to the first or second transfer device, and a delivery chamber connected to the second transfer chamber; and   a plurality of first treatment chambers connected to the delivery chamber, wherein   the main transporting route is configured to hold a substrate so that a surface thereof is parallel to a horizontal plane, and   one of the plurality of treatment chambers is configured to hold the substrate so that the surface is in a direction intersecting the horizontal plane.   
     
     
         2 . The manufacturing device according to  claim 1 , wherein
 another one of the plurality of treatment chambers is configured to hold the substrate so that the surface is parallel to the horizontal plane.   
     
     
         3 . The manufacturing device according to  claim 1 , wherein
 the first transporting chamber has two layers of transporting conveyors so that transportation of the substrate from the first transfer device to the second transfer device and transportation of another substrate from the second transfer device to the first transfer device can be simultaneously executed.   
     
     
         4 . The manufacturing device according to  claim 1 , wherein
 each of the first transfer device and the second transfer device comprises a first port to which the first transporting chamber is connected, a second port connectable to the second transporting chamber, and a third port to which a buffer for storing the substrate is connected, and   the delivery chamber has a fourth port to which the second transporting chamber is connected and a fifth port to which one of the plurality of first treatment chambers is connected.   
     
     
         5 . The manufacturing device according to  claim 4 , wherein
 each of the first to fifth ports has airtightness.   
     
     
         6 . The manufacturing device according to  claim 1 , wherein
 each of the first transfer device, the second transfer device, and the delivery chamber has an arm for transporting the substrate, and   the arm of the delivery chamber has a rotation axis for rotating the substrate between a state where the surface is parallel to the horizontal plane and a state where the surface is in the direction intersecting the horizontal plane.   
     
     
         7 . The manufacturing device according to  claim 1 , further comprising an inlet/outlet connected to the first transfer device at a terminal of the main transporting route, wherein
 the inlet/outlet is configured so that the substrate before treatment is input and a substrate after treatment is output therethrough.