Liquid supply system

Abstract

A liquid supply system that enables a reduction in time required for precooling to reduce the time taken to make a pump operable. A container 130 includes a first casing 131 in which fluid passages passing through a first pump chamber P 1 and a second pump chamber P 2 are provided and a second casing 132 that surrounds the outer wall of the first casing 131 . A space (fourth space K 4 ) between the first casing 131 and the second casing 132 is configured to allow a cryogenic liquid for precooling to flow through it.

1 . A liquid supply system comprising:
 a container having an inlet and an outlet for cryogenic liquid and provided with a pump chamber inside it;   a shaft member that moves vertically upward and downward in the container; and   a bellows that expands and contracts with upward and downward motion of the shaft member;   wherein the pump chamber is formed by a space surrounding the outer circumference of the bellows, the container includes a first casing in which a fluid passage passing through the pump chamber is provided and a second casing configured in such a way as to surround the outer wall of the first casing, and a space between the first casing and the second casing is configured to allow cryogenic liquid for precooling to flow through it.   
     
     
         2 . The liquid supply system according to  claim 1 , wherein the space between the first casing and the second casing is kept in a vacuum state with the cryogenic liquid having been removed from the space between the first casing and the second casing after precooling. 
     
     
         3 . The liquid supply system according to  claim 1 , wherein a hermetically sealed space other than the passage passing through the pump chamber is provided in the interior of the first casing, and the hermetically sealed space and the space between the first casing and the second casing are in communication with each other. 
     
     
         4 . The liquid supply system according to  claim 1 , further comprising a third casing that surrounds the second casing, wherein a hermetically sealed space kept in a vacuum state is formed between the second casing and the third casing.