Mems-based levers and their use for alignment of optical elements

Abstract

A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.

1 .- 30 . (canceled) 
     
     
         31 . A device for use in aligning optical components, comprising:
 a platform for receiving an optical component;   means for flexibly coupling the platform to a base;   an elongate arm coupled to the platform, the elongate arm terminating in a handle; and   means for flexibly coupling the handle to other portions of the elongate arm.   
     
     
         32 . The device of  claim 31 , where the means for flexibly coupling the platform to the base provides at least a translational degree of freedom and the means for flexibly coupling the handle to other portions of the elongate arm provide at least a rotational degree of freedom.