Organic light-emitting display apparatus and organic layer deposition apparatus

Abstract

An organic layer deposition apparatus, including a deposition unit including at least one deposition assembly spaced apart from a substrate, the at least one deposition assembly depositing a material on the substrate, the at least one deposition assembly including a deposition source that discharges a deposition material; a deposition source nozzle unit mounted on the deposition source, the deposition source nozzle unit having a deposition source nozzle formed therein; and a plurality of pattern sheets facing the deposition source nozzle unit and spaced apart from one another so that the deposition material is deposited on a plurality of different regions of the substrate via the plurality of pattern sheets.

1 . An organic layer deposition apparatus, comprising:
 a deposition unit including at least one deposition assembly spaced apart from a substrate, the at least one deposition assembly depositing a material on the substrate,   the at least one deposition assembly including:   a deposition source that discharges a deposition material;   a deposition source nozzle unit mounted on the deposition source, the deposition source nozzle unit having a deposition source nozzle formed therein; and   a plurality of pattern sheets facing the deposition source nozzle unit and spaced apart from one another so that the deposition material is deposited on a plurality of different regions of the substrate via the plurality of pattern sheets.   
     
     
         2 . The organic layer deposition apparatus as claimed in  claim 1 , wherein two of the plurality of different regions of the substrate are parallel to each other. 
     
     
         3 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the plurality of pattern sheets is within a single space. 
     
     
         4 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the deposition source is between adjacent pattern sheets from among the plurality of pattern sheets. 
     
     
         5 . The organic layer deposition apparatus as claimed in  claim 1 , wherein:
 the at least one deposition assembly includes a plurality of the deposition sources, and   each of the plurality of deposition sources corresponds to each of the plurality of pattern sheets.   
     
     
         6 . The organic layer deposition apparatus as claimed in  claim 5 , wherein the plurality of deposition sources are within different spaces, respectively. 
     
     
         7 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the at least one deposition assembly further includes a frame in which the plurality of pattern sheets is mounted. 
     
     
         8 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the at least one deposition assembly further includes a plurality of frames, each of the pattern sheets being respectively mounted in one of the frames. 
     
     
         9 . The organic layer deposition apparatus as claimed in  claim 8 , wherein adjacent frames from among the plurality of frames at least partially overlap each other. 
     
     
         10 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the plurality of pattern sheets is arranged on a same plane. 
     
     
         11 . The organic layer deposition apparatus as claimed in  claim 1 , wherein adjacent pattern sheets from among the plurality of pattern sheets zigzag with respect to a straight line that passes between the adjacent pattern sheets and is parallel to a deposition-proceeding direction. 
     
     
         12 . The organic layer deposition apparatus as claimed in  claim 1 , wherein each of the plurality of pattern sheets is eccentric with respect to a straight line that passes between adjacent pattern sheets and is parallel to a deposition-proceeding direction. 
     
     
         13 . The organic layer deposition apparatus as claimed in  claim 1 , further comprising a first shielding member adjacent to each of the plurality of pattern sheets. 
     
     
         14 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the plurality of pattern sheets are arranged in a diagonal direction with respect to a direction in which the substrate is transferred. 
     
     
         15 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the at least one deposition assembly further includes a second shielding member, the second shielding member separating the plurality of pattern sheets from one another. 
     
     
         16 . The organic layer deposition apparatus as claimed in  claim 15 , wherein the second shielding member is between adjacent pattern sheets from among the plurality of pattern sheets. 
     
     
         17 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the at least one deposition assembly forms a pattern layer on the substrate. 
     
     
         18 . The organic layer deposition apparatus as claimed in  claim 1 , wherein:
 the deposition unit includes a plurality of the deposition assemblies, and   at least certain ones of the plurality of deposition assemblies are within different spaces.   
     
     
         19 . The organic layer deposition apparatus as claimed in  claim 1 , wherein:
 the deposition unit includes a plurality of the deposition assemblies, and   the plurality of deposition assemblies forms different organic layers.   
     
     
         20 . The organic layer deposition apparatus as claimed in  claim 1 , further comprising a conveyer unit that includes a first conveyer unit and a second conveyer unit that cyclically move a moving unit to which the substrate has been detachably fixed, wherein the first conveyer unit conveys, in a first direction, the moving unit, and the second conveyer unit conveys the moving unit separated from the substrate in a second direction opposite to the first direction. 
     
     
         21 . The organic layer deposition apparatus as claimed in  claim 20 , wherein the deposition unit further includes a chamber including the at least one deposition assembly therein and through which the moving unit passes. 
     
     
         22 . The organic layer deposition apparatus as claimed in  claim 20 , further comprising an unloading unit separating the substrate from the moving unit,
 wherein:   the moving unit circulates between the first conveyer unit and the second conveyer unit, and   the substrate fixed to the moving unit is spaced apart from the at least one deposition assembly while the substrate is being moved by the first conveyer unit.   
     
     
         23 . The organic layer deposition apparatus as claimed in  claim 22 , wherein the first conveyer unit sequentially conveys the moving unit to a loading unit, the deposition unit, and the unloading unit. 
     
     
         24 . The organic layer deposition apparatus as claimed in  claim 23 , wherein the second conveyer unit sequentially conveys the moving unit to the unloading unit, the deposition unit, and the loading unit. 
     
     
         25 . The organic layer deposition apparatus as claimed in  claim 20 , wherein the first conveyer unit and the second conveyer unit pass through the deposition unit. 
     
     
         26 . The organic layer deposition apparatus as claimed in  claim 20 , wherein the first conveyer unit and the second conveyer unit are on one another in a vertical direction. 
     
     
         27 . The organic layer deposition apparatus as claimed in  claim 1 , wherein the substrate and the at least one deposition assembly are apart from each other and move relative to each other. 
     
     
         28 . The organic layer deposition apparatus as claimed in  claim 1 , wherein:
 the deposition source nozzle unit includes a plurality of deposition source nozzles arranged in a first direction, and   each of the plurality of pattern sheets includes a plurality of patterning slits in a second direction perpendicular to the first direction.   
     
     
         29 . The organic layer deposition apparatus as claimed in  claim 28 , wherein the deposition source, the deposition source nozzle unit, and at least one of the plurality of pattern sheets are coupled to one another by a connection member and integrally formed with one another. 
     
     
         30 . The organic layer deposition apparatus as claimed in  claim 29 , wherein the connection member guides a movement path of the deposition material. 
     
     
         31 . The organic layer deposition apparatus as claimed in  claim 30 , wherein the connection member shields a space between the deposition source, the deposition source nozzle unit, and at least one of the plurality of pattern sheets from the outside. 
     
     
         32 . An organic light-emitting display apparatus, comprising:
 a substrate;   at least one thin film transistor formed on the substrate, the at least one thin film transistor including a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes contacting the semiconductor active layer;   a plurality of pixel electrodes formed on the at least one thin film transistor;   a plurality of organic layers respectively formed on the plurality of pixel electrodes; and   an opposite electrode formed on the plurality of organic layers,   at least one of the plurality of organic layers on the substrate being formed using the organic layer deposition apparatus as claimed in  claim 1 .   
     
     
         33 .-  43 . (canceled)