US2019385948A1PendingUtilityA1

Layout technique for middle-end-of-line

49
Assignee: QUALCOMM INCPriority: Jun 21, 2017Filed: Aug 30, 2019Published: Dec 19, 2019
Est. expiryJun 21, 2037(~10.9 yrs left)· nominal 20-yr term from priority
H10W 20/42H01L 29/785H01L 29/41791H01L 21/823475H01L 23/5226H01L 29/41725H01L 21/823431H01L 27/0886H10D 84/834H10D 84/0158H10D 84/0149H10D 84/038H10D 64/251H10D 30/6219H10D 30/62
49
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Claims

Abstract

In certain aspects of the disclosure, a die includes one or more fins, a gate formed over a first portion of the one or more fins, and a first contact formed over a second portion of the one or more fins, wherein the first contact includes an extended portion that does not overlap the one or more fins. The die also includes first and second metal lines formed from a first metal layer, wherein the first and second metal lines are spaced apart. The die further includes a first via connecting the first contact to the first metal line, and a second via connecting the first contact to the second metal line, wherein the second via is placed on the extended portion of the first contact.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A die, comprising:
 one or more fins;   a gate formed over a first portion of the one or more fins;   a first contact formed over a second portion of the one or more fins, wherein the first contact includes an extended portion that does not overlap the one or more fins;   first and second metal lines formed from a first metal layer, wherein the first and second metal lines are spaced apart;   a first via connecting the first contact to the first metal line; and   a second via connecting the first contact to the second metal line, wherein the second via is placed on the extended portion of the first contact.   
     
     
         2 . The die of  claim 1 , wherein the first via overlaps the one or more fins. 
     
     
         3 . The die of  claim 1 , wherein the one or more fins comprise multiple fins. 
     
     
         4 . The die of  claim 3 , wherein the multiple fins are merged under the first contact. 
     
     
         5 . The die of  claim 1 , further comprising:
 a third metal line formed from a second metal layer, wherein the second metal layer is above the first metal layer;   a third via connecting the first metal line to the third metal line; and   a fourth via connecting the second metal line to the third metal line.   
     
     
         6 . The die of  claim 5 , wherein the third metal line is perpendicular to the first and second metal lines. 
     
     
         7 . The die of  claim 5 , wherein the third metal line runs parallel with the first contact. 
     
     
         8 . The die of  claim 1 , further including:
 a second contact formed over a third portion of the one or more fins, wherein the second contact includes an extended portion that does not overlap the one or more fins;   third and fourth metal lines formed from the first metal layer, wherein the third and fourth metal lines are spaced apart;   a third via connecting the second contact to the third metal line, wherein the third via is placed on the extended portion of the second contact; and   a fourth via connecting the second contact to the fourth metal line.   
     
     
         9 . The die of  claim 8 , wherein the extended portion of the first contact and the extended portion of the second contact are located on opposite sides of the one or more fins. 
     
     
         10 . The die of  claim 8 , wherein each of the first and fourth vias overlaps the one or more fins. 
     
     
         11 . The die of  claim 8 , wherein the one or more fins comprise multiple fins. 
     
     
         12 . The die of  claim 8 , wherein the first, second, third and fourth metal lines run parallel with one another. 
     
     
         13 . The die of  claim 8 , wherein the first contact and the second contact are located on opposite sides of the gate. 
     
     
         14 . The die of  claim 13 , wherein the first contact is a source contact and the second contact is a drain contact. 
     
     
         15 . The die of  claim 13 , wherein the first contact is a drain contact and the second contact is a source contact. 
     
     
         16 . The die of  claim 1 , wherein the first metal layer is a metal-0 (M0) layer. 
     
     
         17 . The die of  claim 1 , wherein the first metal layer is a middle-end-of-line (MEOL) layer.

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