Inspection Apparatus, Inspection Method, And Program

Abstract

To facilitate setting of a parameter at the time of generating an inspection image from an image acquired by using a photometric stereo principle. A photometric processing part generates an inspection image based on a plurality of luminance images acquired by a camera. A display control part and a display part switch and display the luminance image and the inspection image, or simultaneously display these images. An inspection tool setting part adjusts a control parameter of the camera and a control parameter of an illumination apparatus. Further, when the control parameter is adjusted, the display control part updates the image being displayed on the display part to an image where the control parameter after the change has been reflected.

1 - 20 . (canceled) 
     
     
         21 . An inspection apparatus comprising:
 an illumination section which has a plurality of light segments to illuminate the inspection target from three or more illumination directions;   an imaging section for capturing an image of the inspection target illuminated by the illumination section;   a processor for   controlling the illumination section for lighting each light segment sequentially one by one with respect to the three or more illumination directions and lighting all light segments simultaneously,   controlling the imaging section to acquire three or more luminance images with respectively different illumination directions and all-directional illumination image obtained by simultaneous illumination from three or more directions,   obtaining a normal vector of a surface of the inspection target based on the three or more luminance images acquired by the imaging section, generating a shape image showing a shape of the workpiece based on the normal vector by a photometric stereo method and   selecting an image to be outputted in accordance with user's input, out of the three or more luminance images, all-directional image and the shape image; and   a communication interface for outputting the selected image to an external device.   
     
     
         22 . The inspection apparatus according to  claim 21 , wherein
 the processor obtains an x-inclination and y-inclination image whose pixel value is an inclination component in an x-direction and y-direction of the normal vector obtained from the three or more luminance images, and a reflectance image based on the three or more luminance images by removing an amount of change in luminance value due to the x-inclination and y-inclination component, and selects the image to be outputted out of the three or more luminance images, all-directional image, the shape image and the reflectance image.   
     
     
         23 . The inspection apparatus according to  claim 22 , further comprising;
 a storage device for storing the three or more luminance images, all-directional illumination image, and the shape image;   a display for displaying an user interface for user selecting the image to be outputted; and   an input section for inputting user selection of the image to be outputted through the user interface screen displayed on the display.   
     
     
         24 . The inspection apparatus according to  claim 23 , wherein
 the processor performs a plurality of steps including an imaging step, a pattern search step, a position correcting step and a flaw inspecting step from the start to the end of the inspection flow in accordance with designation inputted by user through the input part.   
     
     
         25 . The inspection apparatus according to  claim 24 , wherein
 the processor selects the image to be outputted, which is designated by an image variable that is added to each step in the inspection flow.   
     
     
         26 . The inspection apparatus according to  claim 24 , wherein
 the processor executes the pattern search by using the all-directional illumination image and sets an inspection region to the shape image or the reflectance image and executes the inspection in the inspection region.   
     
     
         27 . The inspection apparatus according to  claim 24 , wherein
 a plurality of shape images generated from the common imaging step are applied to the inspection flaw.