US2020064369A1PendingUtilityA1

Offset rejection electrodes

Assignee: INVENSENSE INCPriority: May 15, 2015Filed: Nov 4, 2019Published: Feb 27, 2020

Est. expiryMay 15, 2035(~8.8 yrs left)· nominal 20-yr term from priority

Inventors:Matthew Julian Thompson Kirt Williams

G01P 2015/0831G01P 15/125G01D 5/2417B81B 3/0086B81B 2203/04B81B 2201/025B81B 3/0051G01D 3/036B81B 2203/0307B81B 7/0016

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Abstract

A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

Claims

exact text as granted — not AI-modified

What is claimed is: 
     
         1 . A MEMS sensor, comprising:
 a sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane;   at least one anchor coupled to the sensing reference plane;   at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation; and   a pattern of sensing elements on the sensing reference plane to detect motion of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

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