Image sensor and method for fabricating the same

Abstract

An electronic device may include a photoelectric element, a shielding layer on the photoelectric element, and a color filter structure on the shielding layer. The shielding layer may define a first opening over the photoelectric element. The color filter structure may define a second opening over the photoelectric element and the first opening. The color filter structure may appear dark from a view facing the color filter structure.

1 .- 21 . (canceled) 
     
     
         22 . An electronic device, comprising
 a photoelectric element;   a shielding layer on the photoelectric element,
 the shielding layer defining a first opening over the photoelectric element; and 
   a color filter structure on the shielding layer,
 the color filter structure including at least a first color filter layer for filtering a first color and a second color filter layer for filtering a second color that is different than the first color, 
 the second color filter layer on the first color filter layer, 
 the first color filter layer defining a second opening over the first opening, 
 the second color filter layer defining a third opening over the second opening, and 
 a size of the second opening being greater than a size of the first opening and less than a size of the third opening. 
   
     
     
         23 . The electronic device of  claim 22 , wherein a sidewall of the first color filter layer and a sidewall of the second color filter layer are rounded or tapered. 
     
     
         24 . (canceled) 
     
     
         25 . The electronic device of  claim 22 , wherein
 one of the first color and the second color is blue, and   a different one of the first color and the second color is red.   
     
     
         26 . The electronic device of  claim 22 , wherein
 one of the first color and the second color is cyan, and   a different one of the first color and the second color is magenta or yellow.   
     
     
         27 . (canceled) 
     
     
         28 . The electronic device of  claim 22 , further comprising:
 an isolation layer, wherein   the color filter structure is on the isolation layer.   
     
     
         29 . The electronic device of  claim 28 , wherein
 the isolation layer includes an anti-reflection film, and   the anti-reflection film defines an air gap.   
     
     
         30 . The electronic device of  claim 28 , further comprising:
 a substrate, wherein   the substrate includes an isolation trench,   the isolation layer is in the isolation trench,   a depth of the isolation trench is less than a thickness of the substrate,   a sidewall of the isolation trench is tapered,   the substrate includes a mesa region defined by the isolation trench, and   the photoelectric element is in the mesa region of the substrate.   
     
     
         31 . The electronic device of  claim 28 , further comprising:
 a substrate, wherein   the photoelectric element is in the substrate,   the substrate includes an isolation trench that penetrates through a thickness of the substrate, and   the isolation layer fills the isolation trench.   
     
     
         32 . (canceled) 
     
     
         33 . The electronic device of  claim 22 , wherein
 the shielding layer includes a metal layer, and   the metal layer includes at least one of tungsten (W), aluminum (Al), and copper (Cu).   
     
     
         34 . The electronic device of  claim 33 , wherein
 the shielding layer further includes a barrier layer on the metal layer, and   the barrier layer includes a metal nitride.   
     
     
         35 . The electronic device of  claim 22 , further comprising:
 a substrate, wherein   the photoelectric element is in a single pixel region of the substrate, and   the color filter structure covers at least 70 percent of an area of the single pixel region.   
     
     
         36 . An electronic device, comprising
 a photoelectric element; and   a color filter structure on the photoelectric element,   the color filter structure including a first color filter layer, a second color filter layer, and a third color filter layer that are different colors,   the first color filter layer defining a first opening over the photoelectric element,   the second color filter layer defining a second opening over the first opening, the third color filter layer defining a third opening over the second opening, and   a size of the second opening being greater than a size of the first opening and less than a size of the third opening.   
     
     
         37 . (canceled) 
     
     
         38 . The electronic device of  claim 36 , further comprising:
 a microlens on the color filter structure over the first opening.   
     
     
         39 . The electronic device of  claim 36 , further comprising:
 an isolation layer, wherein   the color filter structure is on the isolation layer.   
     
     
         40 . The electronic device of  claim 39 , wherein
 the isolation layer includes an anti-reflection film, and   the anti-reflection film defines an air gap.   
     
     
         41 . The electronic device of  claim 39 , further comprising:
 a substrate, wherein   the substrate includes an isolation trench,   the isolation layer is in the isolation trench,   a depth of the isolation trench is less than a thickness of the substrate,   a sidewall of the isolation trench is tapered,   the substrate includes a mesa region defined by the isolation trench, and   the photoelectric element is in the mesa region of the substrate.   
     
     
         42 . The electronic device of  claim 39 , further comprising:
 a substrate, wherein   the photoelectric element is in the substrate,   the substrate includes an isolation trench that penetrates through a thickness of the substrate, and   the isolation layer fills the isolation trench.   
     
     
         43 . (canceled) 
     
     
         44 . The electronic device of  claim 36 , wherein
 one of the first color filter layer, the second color filter layer, and the third color filter layer is a green filter layer,   a different one of the first color filter layer, the second color filter layer, and the third color filter layer is a blue filter layer, and   an other one of the first color filter layer, the second color filter layer, and the third color filter layer is a red filter layer.   
     
     
         45 . The electronic device of  claim 36 , wherein
 one of the first color filter layer, the second color filter layer, and the third color filter layer is a cyan filter layer,   a different one of the first color filter layer, the second color filter layer, and the third color filter layer is a magenta filter layer, and   an other one of the first color filter layer, the second color filter layer, and the third color filter layer is a yellow filter layer.   
     
     
         46 . The electronic device of  claim 36 , wherein
 a sidewall of the first color filter layer, a sidewall of the second color filter layer, and a sidewall of the third color filter layer are tapered or rounded.   
     
     
         47 .- 58 . (canceled)