Gas-liquid separating device

Abstract

One object of the present invention is to provide a gas-liquid separating device which can efficiently recover a target gas from a mixture containing at least a gas and a liquid in a gas-liquid coexistence state, and the present invention provides a gas-liquid separating device which separates and recovers a gas and a liquid from a mixture containing the gas and the liquid in a gas-liquid coexistence state, wherein the gas-liquid separating device includes an airtight space in which the mixture containing the gas and the liquid in a gas-liquid coexistence state is supplied and the mixture is stored as a mixture separated into gas and liquid, a supply path for supplying the mixture containing the gas and the liquid in a gas-liquid coexistence state into the airtight space, a gas recovery path for discharging the gas in the airtight space to the outside of the airtight space, a first decompressor which is provided in the gas recovery path and recovers the gas from the airtight space, a liquid recovery path for discharging the liquid in the airtight space to the outside of the airtight space, and a second decompressor which is provided in the liquid recovery path and configured to recover the liquid from the airtight space.

1 . A gas-liquid separating device which separates and recovers a gas and a liquid from a mixture containing the gas and the liquid in a gas-liquid coexistence state,
 wherein the gas-liquid separating device includes:   an airtight space which is configured to be supplied with the mixture containing the gas and the liquid in a gas-liquid coexistence state and store the mixture as a mixture separated into gas and liquid;   a supply path which is configured to supply the mixture containing the gas and the liquid in a gas-liquid coexistence state into the airtight space;   a gas recovery path which is configured to discharge the gas in the airtight space to the outside of the airtight space;   a first decompressor which is provided in the gas recovery path and is configured to recover the gas from the airtight space;   a liquid recovery path which is configured to discharge the liquid in the airtight space to the outside of the airtight space; and   a second decompressor which is provided in the liquid recovery path and configured to recover the liquid from the airtight space.   
     
     
         2 . The gas-liquid separating device according to  claim 1 , wherein the gas-liquid separating device further includes a gas-liquid separator which is provided in the liquid recovery path and configured to separate the gas from the liquid and recover the liquid and the gas. 
     
     
         3 . The gas-liquid separating device according to  claim 1 , wherein the gas-liquid separating device further includes a liquid level detection device which is configured to detect the height of a liquid level in the airtight space, an on-off device provided in the liquid recovery path, and a control device which is connected to the liquid level detection device and the on-off device by an electric signal. 
     
     
         4 . The gas-liquid separating device according to  claim 1 , wherein the gas is at least one selected from the group consisting of diborane gas, carbon dioxide, chlorine gas, germane gas, arsine gas, carbon monoxide, and nitric monoxide. 
     
     
         5 . The gas-liquid separating device according to  claim 3 , wherein the on-off device provided in the liquid recovery path is opened or closed via the control device based on a liquid level obtained by the liquid level detection device. 
     
     
         6 . A gas production device, comprising:
 a gas-generating device comprising a supply source of a raw material of a gas, a supply source of a raw material of a liquid, and a mixer which is configured to mix the raw material of a gas and the raw material of a liquid; and   a gas-liquid separating device according to  claim 1 .   
     
     
         7 . The gas production device according to  claim 6 , wherein a back pressure valve is provided in a pipe connecting the gas-generating device and the gas-liquid separating device. 
     
     
         8 . The gas production device according to  claim 6  or  7 , wherein the gas is at least one selected from the group consisting of diborane gas, carbon dioxide, chlorine gas, germane gas, carbon monoxide, and nitric monoxide. 
     
     
         9 . A method for producing a gas, comprising:
 a mixture production step in which a mixture in a gas-liquid coexistence state is produced by supplying each of a raw material of a gas and a raw material of a liquid into a mixer;   a supply step in which the produced mixture in a gas-liquid coexistence state is supplied into a gas-liquid separating device;   a gas recovery step in which the gas is recovered from the mixture in a gas-liquid coexistence state by reducing the pressure in the gas-liquid separating device to equal to or lower than atmospheric pressure.   
     
     
         10 . The method for producing a gas according to  claim 9 , wherein the mixture production step, the supply step, and the gas recovery step are successively carried out. 
     
     
         11 . The gas production device according to  claim 9  or  10 , wherein the gas is at least one selected from the group consisting of diborane gas, carbon dioxide, chlorine gas, germane gas, carbon monoxide, and nitric monoxide.