Graphene synthesis chamber and method of synthesizing graphene by using the same

Abstract

A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.

What is claimed is: 
     
         1 . A graphene synthesis method comprising:
 disposing a substrate including a metal thin film in an inner space of a graphene synthesis chamber;   depressurizing the inner space;   supplying a gas including carbon into the inner space using a gas supplier; and   irradiating a light to the inner space to heat the substrate using a main heating unit,   wherein a first auxiliary heating unit and a second auxiliary heating unit are disposed at both sides of the substrate, respectively, and spaced apart from each other so as to define an auxiliary space therebetween for synthesizing graphene on the substrate, and   wherein the substrate is disposed in the auxiliary space, and spaced apart from the first auxiliary heating unit and the second auxiliary heating unit.   
     
     
         2 . The graphene synthesis method of  claim 1 , wherein a temperature of the auxiliary space is about 1000° C. or higher during graphene synthesis. 
     
     
         3 . The graphene synthesis method of  claim 1 , wherein a temperature of the auxiliary space is substantially constant during graphene synthesis. 
     
     
         4 . The graphene synthesis method of  claim 1 , wherein the main heating unit comprises:
 a first main heating unit which faces a first surface of the substrate; and   a second main heating unit which faces a second surface of the substrate.   
     
     
         5 . The graphene synthesis method of  claim 4 ,
 wherein the first auxiliary heating unit is provided between the first main heating unit and the substrate, and the second auxiliary heating unit is provided between the second main heating unit and the substrate.   
     
     
         6 . The graphene synthesis method of  claim 4 , wherein a temperature of the auxiliary space is higher than (i) a temperature of a space between the first main heating unit and the first auxiliary heating unit, and (ii) a temperature of a space between the second main heating unit and the second auxiliary heating unit. 
     
     
         7 . The graphene synthesis method of  claim 1 , wherein the gas supplier supplies the gas into the auxiliary space. 
     
     
         8 . The graphene synthesis method of  claim 1 , wherein the main heating unit comprises:
 a halogen lamp; and   a window surrounding an outer circumference of the halogen lamp.   
     
     
         9 . The graphene synthesis method of  claim 1 , wherein the gas supplier comprises an extension portion extending toward the auxiliary space. 
     
     
         10 . The graphene synthesis method of  claim 1 , wherein the graphene chamber comprises:
 a gas discharger which discharges the gas flowing through the auxiliary space to an outside.   
     
     
         11 . The graphene synthesis method of  claim 10 , wherein the gas discharger comprises an extension portion extending toward the auxiliary space. 
     
     
         12 . The graphene synthesis method of  claim 1 , wherein each of the first auxiliary heating unit and the second auxiliary heating unit comprises graphite.