High-efficiency capacitor structure

Abstract

A capacitor structure includes at least one first layer and at least one second layer that are alternately stacked. The at least one first layer includes first electrodes and second electrodes alternately arranged in a first direction, and the at least one second layer includes third electrodes and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third electrodes and the fourth electrodes being electrically connected to the first electrodes and the second electrodes. Each of the first electrodes and the second electrodes includes a base portion and branch portions protruding from the base portion, and the third electrodes and the fourth electrodes are arranged side by side to correspond to the branch portions.

What is claimed is: 
     
         1 . A capacitor structure comprising:
 at least one first layer and at least one second layer that are alternately stacked,   wherein the at least one first layer comprises first electrodes and second electrodes alternately arranged in a first direction,   the at least one second layer comprises third electrodes and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third electrodes and the fourth electrodes being electrically connected to the first electrodes and the second electrodes,   each of the first electrodes and the second electrodes comprises a base portion and branch portions protruding from the base portion, and   the third electrodes and the fourth electrodes are arranged side by side to correspond to the branch portions.   
     
     
         2 . The capacitor structure of  claim 1 , wherein each of the first electrodes is capacitively coupled to a respective one of the second electrodes in a horizontal direction of the at least one first layer, and is capacitively coupled to a respective one of the fourth electrodes in a vertical direction of the at least one first layer. 
     
     
         3 . The capacitor structure of  claim 1 , wherein each of the second electrodes is capacitively coupled to a respective one of the first electrodes in a horizontal direction of the at least one first layer, and is capacitively coupled to a respective one of the third electrodes in a vertical direction of the at least one first layer. 
     
     
         4 . The capacitor structure of  claim 1 , wherein the second direction is perpendicular to the first direction. 
     
     
         5 . The capacitor structure of  claim 1 , wherein the base portion extends in the second direction, and
 the branch portions protrude from the base portion in the first direction.   
     
     
         6 . The capacitor structure of  claim 5 , wherein the branch portions are spaced apart from each other and arranged side by side in the second direction. 
     
     
         7 . The capacitor structure of  claim 6 , wherein the branch portions of the first electrode are arranged between the branch portions of the second electrode. 
     
     
         8 . The capacitor structure of  claim 7 , wherein the third electrodes are arranged at a plurality of first positions corresponding to the branch portions of the second electrode, and
 the fourth electrodes are arranged at a plurality of second positions corresponding to the branch portions of the first electrode.   
     
     
         9 . The capacitor structure of  claim 8 , further comprising:
 at least one first contact element interposed between the first electrodes and the third electrodes; and   at least one second contact element interposed between the second electrodes and the fourth electrodes.   
     
     
         10 . The capacitor structure of  claim 9 , wherein the at least one first contact element is arranged at one or more first positions corresponding to the base portion of each of the first electrodes, and
 the at least one second contact element is arranged at one or more second positions corresponding to the base portion of each of the second electrodes.   
     
     
         11 . The capacitor structure of  claim 1 , wherein the at least one first layer comprises a plurality of first layers, and
 the at least one second layer is interposed between the plurality of first layers.   
     
     
         12 . The capacitor structure of  claim 11 , wherein the first electrode is disposed on an outer side of the at least one first layer, and
 the third electrode is disposed on an outer side of the at least one second layer.   
     
     
         13 . The capacitor structure of  claim 12 , further comprising a first plate electrode and a second plate electrode configured to cover outer sides of the plurality of first layers and electrically connected to the first electrodes. 
     
     
         14 . A capacitor structure comprising:
 at least one first layer and at least one second layer that are alternately stacked,   wherein the at least one first layer comprises first electrodes arranged in a first direction,   the at least one second layer comprises second electrodes electrically connected to the first electrodes,   each of the first electrodes comprises a base portion and branch portions protruding from the base portion, and   the second electrodes correspond to the branch portions.   
     
     
         15 . The capacitor structure of  claim 14 , wherein at least one of the first electrodes is not physically connected to at least one of the second electrodes, and
 the at least one of the first electrodes is capacitively coupled to the at least one of the second electrodes.   
     
     
         16 . The capacitor structure of  claim 14 , wherein the second electrodes are arranged side by side to correspond to the branch portions. 
     
     
         17 . The capacitor structure of  claim 14 , wherein at least one of the first electrodes is not physically connected to at least one of the second electrodes, and
 the at least one of the first electrodes is not capacitively coupled to the at least one of the second electrodes.   
     
     
         18 . The capacitor structure of  claim 14 , wherein the base portion extends in a second direction perpendicular to the first direction, and
 the branch portions protrude from the base portion in the first direction.   
     
     
         19 . The capacitor structure of  claim 18 , wherein the branch portions are spaced apart from each other and arranged side by side in the second direction. 
     
     
         20 . The capacitor structure of  claim 14 , further comprising at least one contact element interposed between the first electrodes and the second electrodes. 
     
     
         21 . A capacitor structure comprising:
 a first layer;   a second layer disposed on the first layer;   a third layer disposed on the second layer,   wherein each of the first layer and the third layer comprises first electrodes and second electrodes alternately arranged in a first direction,   each of the first electrodes and the second electrodes comprises a base portion and branch portions protruding from the base portion,   the second layer comprises third electrodes and fourth electrodes alternately arranged in a second direction perpendicular to the first direction,   the third electrodes and the fourth electrodes are arranged to respectively correspond to the branch portions; and   one or more first contact elements interposed between the base portion of each of the first electrodes and the third electrodes; and   one or more second contact element interposed between the base portion of each of the second electrodes and the fourth electrodes.   
     
     
         22 . The capacitor structure of  claim 21 , wherein different voltages are respectively applied to the first electrodes and the second electrodes, and
 the different voltages are respectively applied to the third electrodes and the fourth electrodes.