US2020257199A1PendingUtilityA1

Lithographically patterned electrically conductive hydrogels, photo-curable compositions, and elastomers formed from such compositions

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Assignee: UNIV LELAND STANFORD JUNIORPriority: Oct 27, 2017Filed: Oct 26, 2018Published: Aug 13, 2020
Est. expiryOct 27, 2037(~11.3 yrs left)· nominal 20-yr term from priority
Inventors:Jia LiuYuxin LiuZhenan Bao
G03F 7/20G03F 7/325G03F 7/0046G03F 7/093G03F 7/027
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Claims

Abstract

A photo-curable composition includes a fluorinated monomer including cross-linkable functional groups, and a photoinitiator. Manufacturing methods using the photo-curable composition are provided.

Claims

exact text as granted — not AI-modified
1 . A photo-curable composition comprising:
 a fluorinated monomer including cross-linkable functional groups; and   a photoinitiator.   
     
     
         2 . The photo-curable composition of  claim 1 , wherein the fluorinated monomer is a perfluorinated monomer. 
     
     
         3 . The photo-curable composition of  claim 1 , wherein the fluorinated monomer includes a perfluoropolyether moiety. 
     
     
         4 . The photo-curable composition of  claim 1 , wherein the fluorinated monomer is perfluoropolyether dimethacrylate. 
     
     
         5 . The photo-curable composition of  claim 1 , wherein the cross-linkable functional groups are end groups. 
     
     
         6 - 9 . (canceled) 
     
     
         10 . A manufacturing method comprising:
 applying the photo-curable composition of  claim 1  over a substrate; and   curing the photo-curable composition to form an elastomer.   
     
     
         11 . The manufacturing method of  claim 10 , wherein curing the photo-curable composition includes irradiating the photo-curable composition with light. 
     
     
         12 . The manufacturing method of  claim 10 , further comprising:
 forming an electrically active layer over the elastomer; and   patterning the electrically active layer.   
     
     
         13 . The manufacturing method of  claim 12 , wherein patterning the electrically active layer is performed by photolithography. 
     
     
         14 . The manufacturing method of  claim 10 , further comprising:
 providing an electrically active layer over the substrate prior to applying the photo-curable composition over the substrate, and   wherein applying the photo-curable composition over the substrate includes applying the photo-curable composition over the electrically active layer, and curing the photo-curable composition includes forming the elastomer encapsulating the electrically active layer.   
     
     
         15 . The manufacturing method of  claim 10 , wherein curing the photo-curable composition includes selectively curing regions of the photo-curable composition to form the elastomer as a patterned elastomer, and wherein selectively curing the photo-curable composition is performed by photolithography, and wherein selectively curing the photo-curable composition includes developing using a fluorinated solvent. 
     
     
         16 - 19 . (canceled) 
     
     
         20 . A manufacturing method comprising:
 combining an electrically conductive polymer with an ionic liquid to form an ion gel; and   at least partially removing the ionic liquid in the ion gel to form an electrically conductive hydrogel.   
     
     
         21 . The manufacturing method of  claim 20 , wherein the electrically conductive polymer is poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate). 
     
     
         22 . The manufacturing method of  claim 20 , wherein at least partially removing the ionic liquid is performed by water exchange. 
     
     
         23 . The manufacturing method of  claim 20 , further comprising:
 applying the ion gel over a substrate; and   patterning the ion gel to form a patterned ion gel, and wherein at least partially removing the ionic liquid is performed on the patterned ion gel to form the electrically conductive hydrogel as a stretchable conductor.   
     
     
         24 . The manufacturing method of  claim 23 , wherein patterning the ion gel is performed by photolithography. 
     
     
         25 . The manufacturing method of  claim 20 , wherein a conductivity of the electrically conductive hydrogel is at least 5 S/cm. 
     
     
         26 . The manufacturing method of  claim 20 , wherein a maximum tensile strain of the electrically conductive hydrogel is at least 5%. 
     
     
         27 . The manufacturing method of  claim 20 , wherein the Young's modulus of the electrically conductive hydrogel is 150 kPa or less.

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