Systems and methods for improved waste gas abatement

Abstract

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C 2 F 6 ) and tetrafluoromethane (CF 4 ), as well as particulate-forming silicon dioxide precursors, such as silane (SiH 4 ) and tetraethoxysilane (Si(OC 2 H 5 ) 4 , abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

What is claimed is: 
     
         1 . A system for combustive abatement of waste gases comprising:
 a) a waste gas inlet;   b) an inlet manifold configured to receive the waste gas inlet, the inlet manifold comprising:
 a first plenum chamber having a first exterior wall and a first permeable interior wall, 
 a first plenum inlet configured to supply a first gas through the first plenum chamber to the first permeable interior wall, and 
 at least one aperture coupled to the waste gas inlet and extending through the first exterior wall and the first permeable interior wall; 
   c) a thermal reaction chamber coupled to the inlet manifold and configured to receive (i) a waste gas from the waste gas inlet through the at least one aperture and (ii) the first gas through the first permeable interior wall, the thermal reaction chamber comprising:
 a central chamber, 
 a second plenum chamber at least partially surrounding the central chamber having a second plenum inlet configured to receive a supply of a second gas, 
 a second permeable interior wall between the central chamber and the second plenum chamber, and 
 a second exterior wall at least partially defining the second plenum chamber; and 
   d) a controller configured to maintain a flow of the first gas, the second gas, or both the first and second gas, and control combustion at the surface of at least a portion of the first permeable interior wall and at least a portion of the second permeable interior wall,   wherein
 i. at least a portion of the surface of the first permeable interior wall comprises a burner surface configured for permeation of a mixture comprising combustible gas and at least a portion of the surface of the second permeable interior wall is configured for permeation of a mixture comprising non-combustible gas; or 
 ii. at least a portion of the surface of the second permeable interior wall comprises a burner surface configured for permeation of a mixture comprising a combustible gas and at least a portion of the surface of the first permeable interior wall is configured for permeation of a mixture comprising non-combustible gas. 
   
     
     
         2 . A system in accordance with  claim 1 , wherein the inlet manifold is substantially cylindrical with a length to diameter ratio of between about 1:1 and about 1:6. 
     
     
         3 . A system in accordance with  claim 1 , wherein the inlet manifold is substantially cylindrical with a length to diameter ratio of about 1:2. 
     
     
         4 . A system in accordance with any preceding claim, wherein the at least one aperture further comprises one or more micro-apertures in fluid communication with the first plenum chamber. 
     
     
         5 . A system in accordance with any preceding claim, wherein the at least one aperture has a diameter of about ¼ inch to about 4 inches. 
     
     
         6 . A system in accordance with  claim 5 , wherein the at least one aperture has a diameter of about ½ inch to about 2 inches. 
     
     
         7 . A system in accordance with  claim 5 , wherein the at least one aperture has a diameter of about 1 inch. 
     
     
         8 . A system in accordance with any preceding claim, wherein the thermal reaction chamber is substantially cylindrical with a length to diameter ratio of between about 1:0.1 to about 1:10. 
     
     
         9 . A system in accordance with  claim 8 , wherein the thermal reaction chamber is substantially cylindrical with a length to diameter ratio of about 1:0.5 to about 1:6. 
     
     
         10 . A system in accordance with  claim 8 , wherein the thermal reaction chamber is substantially cylindrical with a length to diameter ratio of about 1:1. 
     
     
         11 . A system in accordance with any one of  claims 1 - 7 , wherein the thermal reaction chamber is substantially cylindrical with a length to diameter ratio of about 2:1 to about 10:1. 
     
     
         12 . A system in accordance with any preceding claim, wherein the first permeable interior wall has an average thickness within the range of about 0.125 inches to about 2 inches. 
     
     
         13 . A system in accordance with any preceding claim, wherein the second permeable interior wall has an average thickness within the range of about 0.125 inches to about 2 inches. 
     
     
         14 . A system in accordance with any preceding claim, wherein at least a portion of the first permeable interior wall comprises metal fiber, ceramic fiber, metal foam, ceramic foam, or combinations thereof. 
     
     
         15 . A system in accordance with any preceding claim, wherein at least a portion of the second permeable interior wall comprises metal fiber, ceramic fiber, metal foam, ceramic foam, or combinations thereof. 
     
     
         16 . A system in accordance with any preceding claim, wherein at least a portion of the first permeable interior wall and at least a portion of the second permeable interior wall comprises metal fiber, ceramic fiber, metal foam, ceramic foam, or combinations thereof. 
     
     
         17 . A system in accordance with any preceding claim, wherein at least a portion of the surface of the first permeable interior wall comprises a burner surface configured for permeation of a mixture comprising a combustible gas and at least a portion of the surface of the second permeable interior wall is configured for permeation of a mixture comprising non-combustible gas. 
     
     
         18 . A system in accordance with  claim 17 , wherein the burner surface of the first permeable interior wall comprises metal fibers, the metal fibers comprising a high-temperature metal alloy comprising iron, chromium, nickel, aluminum, or combinations or alloys thereof. 
     
     
         19 . A system in accordance with  claim 17  or  claim 18 , wherein at least 10% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         20 . A system in accordance with  claim 17  or  claim 18 , wherein at least 25% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         21 . A system in accordance with  claim 17  or  claim 18 , wherein at least 50% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         22 . A system in accordance with  claim 17  or  claim 18 , wherein at least 75% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         23 . A system in accordance with  claim 17  or  claim 18 , wherein at least 90% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         24 . A system in accordance with  claim 17  or  claim 18 , wherein at least 95% of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         25 . A system in accordance with  claim 17  or  claim 18 , wherein substantially all of the surface of the first permeable interior wall comprises a burner surface. 
     
     
         26 . A system in accordance with any one of  claims 17 - 25 , wherein at least 10% of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         27 . A system in accordance with any one of  claims 17 - 25 , wherein at least 25% of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         28 . A system in accordance with any one of  claims 17 - 25 , wherein at least 50% of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         29 . A system in accordance with any one of  claims 17 - 25 , wherein at least 75% of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         30 . A system in accordance with any one of  claims 17 - 25 , wherein at least 90% of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         31 . A system in accordance with any one of  claims 17 - 25 , wherein substantially all of the surface of the second permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         32 . A system in accordance with any one of  claims 17 - 31 , wherein the first permeable interior wall and the second permeable interior wall have a surface area ratio in the range of about 1:1 to about 1:10. 
     
     
         33 . A system in accordance with any one of  claims 17 - 31 , wherein the first permeable interior wall and the second permeable interior wall have a surface area ratio in the range of about 1:2 to about 1:5. 
     
     
         34 . A system in accordance with any one of  claims 1 - 16 , wherein at least a portion of the surface of the second permeable interior wall comprises a burner surface configured for permeation of a mixture comprising a combustible gas and at least a portion of the surface of the first permeable interior wall is configured for permeation of a mixture comprising non-combustible gas. 
     
     
         35 . A system in accordance with  claim 34 , wherein the burner surface of the second permeable interior wall comprises metal fibers, the metal fibers comprising a high-temperature metal alloy comprising iron, chromium, nickel, aluminum, or combinations or alloys thereof. 
     
     
         36 . A system in accordance with  claim 34  or  35 , wherein at least 10% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         37 . A system in accordance with any one of  claim 34  or  35 , wherein at least 25% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         38 . A system in accordance with  claim 34  or  35 , wherein at least 50% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         39 . A system in accordance with  claim 34  or  35 , wherein at least 75% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         40 . A system in accordance with  claim 34  or  35 , wherein at least 90% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         41 . A system in accordance with  claim 34  or  35 , wherein at least 95% of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         42 . A system in accordance with  claim 34  or  35 , wherein substantially all of the surface of the second permeable interior wall comprises a burner surface. 
     
     
         43 . A system in accordance with any one of  claims 34 - 42 , wherein at least 10% of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         44 . A system in accordance with any one of  claims 34 - 42 , wherein at least 25% of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         45 . A system in accordance with any one of  claims 34 - 42 , wherein at least 50% of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         46 . A system in accordance with any one of  claims 34 - 42 , wherein at least 75% of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         47 . A system in accordance with any one of  claims 34 - 42 , wherein at least 90% of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         48 . A system in accordance with any one of  claims 34 - 42 , wherein substantially all of the surface of the first permeable interior wall is configured for permeation of a mixture comprising a non-combustible gas. 
     
     
         49 . A system in accordance with any one of  claims 34 - 48 , wherein the second permeable interior wall and the first permeable interior wall have a surface area ratio in the range of about 1:1 to about 1:10. 
     
     
         50 . A system in accordance with any one of  claims 34 - 48 , wherein the second permeable interior wall and the first permeable interior wall have a surface area ratio in the range of about 1:2 to about 1:5. 
     
     
         51 . A system in accordance with any preceding claim, wherein the first permeable interior wall comprises a substantially horizontal ceiling of the thermal reaction chamber and the second permeable interior wall comprises a substantially vertical column of the thermal reaction chamber. 
     
     
         52 . A system in accordance with any one of  claims 1 - 50 , wherein the first permeable interior wall comprises a substantially vertical column of the thermal reaction chamber and the second permeable interior wall comprises a substantially horizontal ceiling of the thermal reaction chamber. 
     
     
         53 . A system in accordance with any preceding claim, wherein the waste gas inlet is configured to supply the waste gas, in combination with an oxidant, fuel, or inert gas, through the first plenum chamber to the first permeable interior wall. 
     
     
         54 . A system in accordance with  claim 53 , wherein the first permeable interior wall is permeable to the waste gas. 
     
     
         55 . A system in accordance with any preceding claim, wherein the combustible gas comprises hydrogen gas, one or more gaseous hydrocarbons, or mixtures thereof. 
     
     
         56 . A system in accordance with  claim 55 , wherein the combustible gas comprises methane, ethane, propane, butane, or natural gas. 
     
     
         57 . A system in accordance with any preceding claim, wherein the non-combustible gas comprises an inert gas, nitrogen, air, or combinations thereof. 
     
     
         58 . A system in accordance with any preceding claim, wherein an oxidant is added to at least one of the first gas, the second gas, the combustible gas, or the non-combustible gas. 
     
     
         59 . A system in accordance with  claim 58 , wherein the oxidant is oxygen. 
     
     
         60 . A system in accordance with  claim 58  or  claim 59 , wherein at least one of the first gas or the second gas is a mixture of the oxidant and the non-combustible gas. 
     
     
         61 . A system in accordance with  claim 60 , wherein the mixture of the oxidant and the non-combustible gas comprises oxygen and nitrogen. 
     
     
         62 . A system in accordance with  claim 60  or  claim 61 , wherein the first gas comprises a mixture of the oxidant and the non-combustible gas. 
     
     
         63 . A system in accordance with  claim 60  or  claim 61 , wherein the second gas comprises a mixture of the oxidant and the non-combustible gas. 
     
     
         64 . A system in accordance with any preceding claim, wherein the system further comprises an exit gas apparatus. 
     
     
         65 . A system in accordance with any preceding claim, wherein the system comprises a destruction and removal efficiency (DRE) of perfluorocarbons higher than 90%. 
     
     
         66 . A system in accordance with any preceding claim, wherein the system comprises a destruction and removal efficiency (DRE) of perfluorocarbons higher than 95%. 
     
     
         67 . A system in accordance with any preceding claim, wherein the system comprises a destruction and removal efficiency (DRE) of silane gas higher than 95%. 
     
     
         68 . A system in accordance with any preceding claim, wherein the system comprises a destruction and removal efficiency (DRE) of silane gas higher than 99%. 
     
     
         69 . A system in accordance with any preceding claim, wherein a combustible gas feedline is connected to the first plenum inlet, the second plenum inlet, or the first and second plenum inlets. 
     
     
         70 . A system in accordance with any preceding claim, wherein a non-combustible gas feedline is connected to the first plenum inlet, the second plenum inlet, or the first and second plenum inlets. 
     
     
         71 . A system in accordance with any preceding claim, wherein the system further comprises at least one ignition element sufficient to ignite the combustible gas at one or more burner surfaces of the first permeable interior wall, the second permeable interior wall, or both the first and second permeable interior walls. 
     
     
         72 . A system in accordance with any preceding claim, wherein the controller controls combustion by controlling at least one of (i) a flow rate of at least one of the first and second gas; (ii) a composition of at least one of the first and second gas; and (iii) ignition of one or more burner surfaces of at least one of the first and second permeable interior wall. 
     
     
         73 . A system in accordance with any preceding claim, wherein the at least one aperture of the inlet manifold comprises a boundary that is substantially impermeable to the waste gas, the first gas, or the waste gas and the first gas. 
     
     
         74 . A system in accordance with any preceding claim, wherein the first plenum chamber comprises a boundary that is substantially impermeable to the waste gas, the first gas, or the waste gas and the first gas. 
     
     
         75 . A system in accordance with any preceding claim, wherein the first plenum inlet is configured to receive a gas feedline. 
     
     
         76 . A system in accordance with  claim 75 , wherein the gas feedline delivers combustible gas, non-combustible gas, or a combination of combustible and non-combustible gas. 
     
     
         77 . A system in accordance with any preceding claim, wherein the second plenum inlet is configured to receive a gas feedline. 
     
     
         78 . A system in accordance with  claim 77 , wherein the gas feedline delivers combustible gas, non-combustible gas, or a combination of combustible and non-combustible gas. 
     
     
         79 . A system in accordance with any preceding claim, wherein the first gas is an oxidant, a non-combustive gas, or a combustive gas selected from the group consisting of nitrogen, oxygen, air, hydrogen, gaseous hydrocarbons, or mixtures thereof. 
     
     
         80 . A method for the combustive abatement of waste gas using the system of  claim 1 . 
     
     
         81 . A method in accordance with  claim 81 , wherein the method comprises introducing a waste gas to the thermal reaction chamber through the waste gas inlet and the inlet manifold;
 controlling the flow of combustible gas at the burner surface of at least a one of the first and second permeable interior walls;   controlling the flow of non-combustible gas to at least a portion of one or more of the first and second permeable interior walls   
       wherein
 the combustible gas abates the waste gas, and 
 the flow of non-combustible gas removes or prevents the formation of particles at the surface of at least one of the first or second permeable interior walls.