Method for manufacturing titanium or titanium alloy thin oxide film having micro-holes

Abstract

The cathode member 4 and the anode member 5 are respectively connected to a negative electrode and a positive electrode of a direct current power supply 3 . In the processing device 1 , the anode member 5 is a member to be processed, and a member using a thin film made of titanium or a titanium alloy is used therefor. A sulfuric acid solution or an electrolytic sulfuric acid solution S having an oxidizing agent concentration of 5 g/L or more with a hydrofluoric compound dissolved therein at 0.5% by weight or less is accommodated in the processing tank 2 , and electrolysis processing is performed at a current density of 1-20 A/dm 2 . The processing device is applicable to a method for manufacturing, from a titanium or titanium alloy thin film, a thin oxide film of titanium or a titanium alloy having holes of 100 nm or less.

1 . A method for manufacturing a titanium or titanium alloy thin oxide film having micro-holes, which takes a titanium or titanium alloy thin film as an anode, and performs an electrolysis processing at a current density of 1-20 A/dm 2  in a sulfuric acid solution with a hydrofluoric compound dissolved therein at 0.5% by weight or less or an electrolytic sulfuric acid solution having an oxidizing agent concentration of 5 g/L or more with a hydrofluoric compound dissolved therein at 0.5% by weight or less. 
     
     
         2 . The method for manufacturing a titanium or titanium alloy thin oxide film having micro-holes according to  claim 1 , wherein the sulfuric acid concentration of the sulfuric acid solution or the electrolytic sulfuric acid solution is 10% by weight or more. 
     
     
         3 . The method for manufacturing a titanium or titanium alloy thin oxide film having micro-holes according to  claim 1 , wherein the hydrofluoric compound is ammonium fluoride. 
     
     
         4 . The method for manufacturing a titanium or titanium alloy thin oxide film having micro-holes according to  claim 1 , wherein a processing time of the electrolysis processing performed using the sulfuric acid solution or the electrolytic sulfuric acid solution with a hydrofluoric compound dissolved therein is 30-60 seconds. 
     
     
         5 . The method for manufacturing a titanium or titanium alloy thin oxide film having micro-holes according to  claim 1 , performing an electrolysis processing in an electrolytic sulfuric acid solution with no hydrofluoric compound dissolved therein after the electrolysis processing performed using the sulfuric acid solution or the electrolytic sulfuric acid solution with a hydrofluoric compound dissolved therein.