Gas leak detection device, workpiece inspection device and leak inspection method

Abstract

A workpiece inspection device includes an inspection chamber that is filled with an inspection gas different from atmospheric air and accommodates a workpiece, an inspection unit that inspects the workpiece accommodated in the inspection chamber, and a gas leak suppression structure that suppresses a leak of the inspection gas in the inspection chamber that occurs when the workpiece is inserted into and removed from the inspection chamber.

What is claimed is: 
     
         1 . A workpiece inspection device comprising:
 an inspection chamber that is filled with an inspection gas different from atmospheric air and accommodates a workpiece;   an inspection unit that inspects the workpiece accommodated in the inspection chamber; and   a gas leak suppression structure that suppresses a leak of the inspection gas in the inspection chamber that occurs when the workpiece is inserted into and removed from the inspection chamber.   
     
     
         2 . The workpiece inspection device according to  claim 1 ,
 wherein the inspection chamber includes an entrance for insertion and removal of the workpiece.   
     
     
         3 . The workpiece inspection device according to  claim 2 ,
 wherein the gas leak suppression structure is provided with   an airtight accommodation portion that includes an accommodation space, in which the workpiece is accommodated airtightly with respect to an outside, and passes through the entrance while closing the entrance, and   wherein the airtight accommodation portion is provided with a plurality of divided bodies that form different regions of an inner surface of the accommodation space respectively and are configured to move with respect to each other.   
     
     
         4 . The workpiece inspection device according to  claim 3 ,
 wherein the plurality of divided bodies include   a first divided body that rotates around an axis orthogonal to a direction which the entrance faces, and   a plurality of second divided bodies that are arranged in a circumferential direction of the first divided body, and   wherein each of the plurality of second divided bodies is connected to an outer circumference of the first divided body, is configured to move with respect to the first divided body, and forms the accommodation space together with the first divided body.   
     
     
         5 . The workpiece inspection device according to  claim 3 ,
 wherein the entrance includes two entrances,   wherein the plurality of divided bodies include a plurality of belt-shaped divided bodies each of which passes through the two entrances and has a belt-shape, and   wherein the plurality of belt-shaped divided bodies are brought close to each other at the two entrances such that the workpiece is accommodated in the accommodation space and are separated from each other inside the inspection chamber such that the workpiece is free from the belt-shaped divided bodies.   
     
     
         6 . The workpiece inspection device according to  claim 2 ,
 wherein the gas leak suppression structure is provided with   an accommodation portion that is disposed in the inspection chamber and includes an accommodation space in which the workpiece is accommodated through the entrance, and   a lid portion that opens and closes the entrance from an outside of the inspection chamber,   wherein the accommodation portion is provided with a plurality of divided bodies that form different regions of an inner surface of the accommodation space respectively and are configured to move with respect to each other,   wherein the plurality of divided bodies form the accommodation space in a state of being combined with each other, and   wherein the plurality of divided bodies make the accommodation space airtight with respect to the inspection chamber in a state where the accommodation space is formed.   
     
     
         7 . The workpiece inspection device according to  claim 2 ,
 wherein the gas leak suppression structure is provided with   a preparation chamber that is provided to be connected to the entrance and includes an opening that leads to an outside,   a first door that is configured to open and close the entrance, and   a second door that is configured to open and close the opening.   
     
     
         8 . The workpiece inspection device according to  claim 7 ,
 wherein the entrance includes a plurality of entrances, and   wherein the preparation chamber is provided to be connected to each of the plurality of entrances.   
     
     
         9 . The workpiece inspection device according to  claim 2 ,
 wherein the gas leak suppression structure is provided with a door that is configured to open and close the entrance, and   wherein a shape and a size of the entrance change in accordance with a shape and a size of the workpiece entering or exiting the inspection chamber in response to an operation of the door.   
     
     
         10 . The workpiece inspection device according to  claim 9 ,
 wherein the door is provided with two sliding doors.   
     
     
         11 . The workpiece inspection device according to  claim 10 ,
 wherein the two sliding doors include a first sliding door that includes a first portion and a second sliding door that includes a second portion facing the first portion, and   wherein the door is provided with   a first roller portion that has a columnar shape extending in a direction along an axis, is provided at the first portion, and rotates around the axis, and   a second roller portion that has a columnar shape extending in a direction along an axis, is provided at the second portion, and rotates around the axis.   
     
     
         12 . The workpiece inspection device according to  claim 2 ,
 wherein the gas leak suppression structure is provided with   a sealing portion that is provided at an edge of the entrance and fills a gap between the entrance and the workpiece when the workpiece passes through the entrance.   
     
     
         13 . The workpiece inspection device according to  claim 1 ,
 wherein the inspection unit is provided with a gas sensor that detects the inspection gas leaking into the workpiece from the inspection chamber.   
     
     
         14 . The workpiece inspection device according to  claim 1 ,
 wherein the inspection unit is provided with an ultrasonic oscillation unit that irradiates the workpiece disposed in the inspection chamber with an ultrasonic wave and an ultrasonic reception unit that measures the ultrasonic wave reflected by or transmitted through the workpiece disposed in the inspection chamber.   
     
     
         15 . A gas leak detection device comprising:
 a chamber that accommodates a detection target object and in which a gas is introduced into a space between the detection target object and the chamber; and   a gas sensor device that is disposed inside the detection target object and detects the gas.   
     
     
         16 . The gas leak detection device according to  claim 15 , further comprising:
 a lid member that closes an opening of the detection target object,   wherein the gas sensor device is attached to the lid member.   
     
     
         17 . The gas leak detection device according to  claim 15 ,
 wherein the gas sensor device moves inside the detection target object.   
     
     
         18 . The gas leak detection device according to  claim 15 ,
 wherein the gas sensor devices include a plurality of gas sensor devices disposed inside the detection target object.   
     
     
         19 . The gas leak detection device according to  claim 18 , further comprising:
 a gas sensor device support that supports the plurality of gas sensor devices.   
     
     
         20 . The gas leak detection device according to  claim 19 ,
 wherein the gas sensor device support is introduced into the detection target object in a folded state and is unfolded inside the detection target object.   
     
     
         21 . The gas leak detection device according to  claim 15 , further comprising:
 a circulation unit that circulates a gas in a space inside the detection target object.   
     
     
         22 . The gas leak detection device according to  claim 15 ,
 wherein the chamber is deformable.   
     
     
         23 . The gas leak detection device according to  claim 15 ,
 wherein the chamber is provided with an intake port through which the gas is introduced and an exhaust port through which the gas is discharged.   
     
     
         24 . The gas leak detection device according to  claim 15 ,
 wherein the gas sensor device includes a gas sensor device for high-concentration detection and a gas sensor device for low-concentration detection, and   wherein the gas sensor device for low-concentration detection is configured to perform gas outflow inspection on the detection target object from which no gas outflow has been detected by the gas sensor device for high-concentration detection.   
     
     
         25 . The gas leak detection device according to  claim 24 , further comprising:
 a drive unit that drives at least one of the gas sensor device for high-concentration detection and the gas sensor device for low-concentration detection.   
     
     
         26 . A leak inspection method of inspecting a gas leak detection device including: a chamber that accommodates a detection target object and in which a gas is introduced into a space between the detection target object and the chamber; and a gas sensor device that is disposed inside the detection target object and detects the gas, by using a workpiece inspection device including: an inspection chamber that is filled with an inspection gas different from atmospheric air and accommodates a workpiece; an inspection unit that inspects the workpiece accommodated in the inspection chamber; and a gas leak suppression structure that suppresses a leak of the inspection gas in the inspection chamber that occurs when the workpiece is inserted into and removed from the inspection chamber, the leak inspection method comprising:
 disposing the gas leak detection device in the inspection chamber; and   inspecting the gas leak detection device disposed in the inspection chamber by using the inspection unit.