Nanostructure energy storage and electronic device

Abstract

A nanostructure energy storage device comprising: a first electrode provided on an electrically insulating surface portion of a substrate; a plurality of conductive nanostructures provided on the first electrode; a conduction controlling material conformally coating each nanostructure in the plurality of conductive nanostructures; and a second electrode covering the conduction controlling material, wherein the first electrode and the second electrode are configured to allow electrical connection of the nanostructure energy storage device to an integrated circuit.

What is claimed is: 
     
         32 . A nanostructure energy storage device comprising:
 a first electrode provided on an electrically insulating surface portion of a substrate;   a plurality of conductive nanostructures provided on the first electrode;   a conduction controlling material conformally coating each nanostructure in said plurality of conductive nanostructures; and   a second electrode covering said conduction controlling material,   wherein said first electrode and said second electrode are configured to allow electrical connection of said nanostructure energy storage device to an integrated circuit.   
     
     
         33 . The nanostructure energy storage device according to  claim 32 , wherein said first electrode is included in a conductor pattern on said substrate. 
     
     
         34 . The nanostructure energy storage device according to  claim 32 , wherein the substrate includes redistribution lines and/or layers and/or vias. 
     
     
         35 . The nanostructure energy storage device according to  claim 32 , wherein said conductive nanostructures are vertical nanostructures grown on the first electrode. 
     
     
         36 . The nanostructure energy storage device according to  claim 35 , further comprising a catalyst layer between said first electrode and said conductive nanostructures. 
     
     
         37 . The nanostructure energy storage device according to  claim 32 , wherein the plurality of conductive nanostructures includes nanofibers, nanotubes or nanowires. 
     
     
         38 . The nanostructure energy storage device according to  claim 32 , wherein said conductive nanostructures are carbon nanostructures. 
     
     
         39 . The nanostructure energy storage device according to  claim 32 , wherein said nanostructure energy storage device is a nanostructure capacitor, and said conduction controlling material is a dielectric material. 
     
     
         40 . The nanostructure energy storage device according to  claim 32 , wherein said nanostructure energy storage device is a nanostructure battery, and said conduction controlling material is a solid electrolyte. 
     
     
         41 . The nanostructure energy storage device according to  claim 32 , further comprising a conductive helplayer arranged between the nanostructures and the electrically insulating surface portion of the substrate, the conductive helplayer being selectively removed between and around the nanostructures. 
     
     
         42 . The nanostructure energy storage device according to  claim 32 , wherein each of the nanostructures is formed on a stack of layers comprising materials permitting interdiffusion of the layers of materials, wherein the interdiffused materials are present in the nanostructure. 
     
     
         43 . An electronic device comprising:
 an integrated circuit; and   the nanostructure energy storage device according to  claim 32  coupled to the integrated circuit.   
     
     
         44 . An electronic device comprising:
 a nanostructure energy storage device comprising:
 a first electrode provided on an electrically insulating surface portion of a substrate including redistribution lines and/or layers and/or vias; 
   a plurality of conductive nanostructures provided on the first electrode;   a conduction controlling material conformally coating each nanostructure in said plurality of conductive nanostructures; and   a second electrode covering said conduction controlling material,   wherein said first electrode and said second electrode are configured to allow electrical connection of said nanostructure energy storage device to an integrated circuit; and   an integrated circuit coupled to at least one of the first electrode and the second electrode of the nanostructure energy storage device through the redistribution lines and/or layers and/or vias.   
     
     
         45 . An interposer device for arrangement between an integrated circuit and a device substrate to interconnect the integrated circuit and the device substrate through said interposer device, said interposer device comprising:
 an interposer substrate having an electrically insulating surface portion;   a plurality of conducting vias extending through said interposer substrate;   a conductor pattern provided on said electrically insulating surface portion of the interposer substrate, said conductor pattern being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said device substrate, and   a nanostructure energy storage device comprising:   a first electrode provided on the electrically insulating surface portion of the interposer substrate;   a plurality of conductive nanostructures provided on the first electrode;   a conduction controlling material conformally coating each nanostructure in said plurality of conductive nanostructures; and   a second electrode covering said conduction controlling material,   wherein said first electrode and said second electrode are configured to allow electrical connection of said nanostructure energy storage device to said integrated circuit.   
     
     
         46 . The interposer device according to  claim 45 , wherein:
 the nanostructure energy storage device is at least partly embedded in the interposer substrate; and   at least one of the conducting vias is connected to the first electrode.   
     
     
         47 . The interposer device according to  claim 45 , wherein:
 the nanostructure energy storage device is at least partly embedded in the interposer substrate; and   at least one of the conducting vias is connected to the second electrode.   
     
     
         48 . The interposer device according to  claim 45 , wherein:
 the nanostructure energy storage device is at least partly embedded in the interposer substrate;   at least one of the conducting vias is connected to the first electrode; and   at least one of the conducting vias is connected to the second electrode.   
     
     
         49 . The interposer device according to  claim 45 , wherein:
 the nanostructure energy storage device is at least partly embedded in the interposer substrate; and   each of the first electrode and the second electrode is at least partly provided on top of the nanostructure energy storage device.   
     
     
         50 . The interposer device according to  claim 45 , wherein:
 the nanostructure energy storage device is at least partly embedded in the interposer substrate; and   at least one of the first electrode and the second electrode is partly on the nanostructure energy storage device and partly directly on the interposer substrate.   
     
     
         51 . An electronic device, comprising:
 a device substrate;   an integrated circuit; and   an interposer device arranged between the integrated circuit and the device substrate to interconnect the integrated circuit and the device substrate through said interposer device, said interposer device comprising:
 an interposer substrate having an electrically insulating surface portion; 
 a plurality of conducting vias extending through said interposer substrate; 
 a conductor pattern provided on said electrically insulating surface portion of the interposer substrate, said conductor pattern being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said device substrate, and 
 a nanostructure energy storage device comprising:
 a first electrode provided on the electrically insulating surface portion of the interposer substrate; 
 a plurality of conductive nanostructures provided on the first electrode; 
 a conduction controlling material conformally coating each nanostructure in said plurality of conductive nanostructures; and 
 a second electrode covering said conduction controlling material, 
 wherein said first electrode and said second electrode are configured to allow electrical connection of said nanostructure energy storage device to said integrated circuit. 
 
   
     
     
         52 . The electronic device according to  claim 51 , further comprising a battery and/or power management unit, wherein the interposer device is electrically connected to the battery and/or power management unit to allow the nanostructure energy storage device of the interposer device to receive energy from the battery and/or power management unit.