US2020386455A1PendingUtilityA1

Refrigeration machine

37
Assignee: LEYBOLD GMBHPriority: Aug 25, 2016Filed: Aug 8, 2017Published: Dec 10, 2020
Est. expiryAug 25, 2036(~10.1 yrs left)· nominal 20-yr term from priority
Inventors:Bernhard FischerGerhard WalterDirk KalischJennifer Ashcroft
F25B 43/003F25B 31/004F25B 9/00F25B 43/02F25B 9/002F25B 2500/16F25B 9/008F25B 2400/23
37
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Claims

Abstract

A refrigeration machine, in particular a cryopump for generating a vacuum, having a compressor for compressing a refrigerant substantially comprising helium and oil. Together with the compressor, an oil separator is arranged downstream in the delivery direction of the coolant. Furthermore, a cooling device in which the refrigeration medium expands. In order to adsorb harmful gases, an adsorption device is arranged upstream of the cooling device in the delivery direction.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . Refrigeration machine, in particular a cryopump for generating a vacuum, having a compressor for compressing a refrigerant substantially comprising helium and oil,
 an oil separator arranged downstream of the compressor in the delivery direction of the refrigerant and a cooling device in which the refrigerant expands,   wherein   a gas adsorption device is arranged upstream of the cooling device in the delivery direction.   
     
     
         2 . Refrigeration machine of  claim 1 , wherein the gas adsorption device adsorbs detrimental gases that freeze at temperatures of <150 K. 
     
     
         3 . Refrigeration machine of  claim 1 , wherein the gas adsorption device is configured to filter nitrogen and/or oxygen. 
     
     
         4 . Refrigeration machine of  claim 1 , wherein the gas adsorption device is arranged in a region upstream of the cooling device, where the temperature is higher than the temperature at which the gas to be absorbed freezes. 
     
     
         5 . Refrigeration machine of  claim 1 , wherein the gas adsorption device is arranged downstream of the oil separator in the delivery direction. 
     
     
         6 . Refrigeration machine of  claim 1 , wherein the gas adsorption device is arranged in the cooling device in particular in the inlet region of the cooling device. 
     
     
         7 . Refrigeration machine of  claim 1 , wherein the gas adsorption device is configured as an adsorbing laxer and/or powder and/or fabric and/or screen. 
     
     
         8 . A method of using a gas adsorption device in a coolant circuit of the refrigeration machine according to  claim 1 . 
     
     
         9 . Refrigeration machine of  claim 1 , wherein the gas adsorption device adsorbs detrimental gases that freeze at temperatures of <120 K. 
     
     
         10 . Refrigeration machine of  claim 1 , wherein the gas adsorption device adsorbs detrimental gases that freeze at temperatures of <70 K.

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