Piston-mode spatial light modulator

Abstract

A piston-mode spatial light modulator (SLM) includes a mirror and an electrode. The electrode is attached to the mirror. The electrode includes: a rigid body; and three spring legs coupled to the rigid body and configured to displace the rigid body responsive to an electrostatic force applied to the electrode.

What is claimed is: 
     
         1 . A piston-mode spatial light modulator (SLM) comprising:
 a mirror; and   an electrode attached to the mirror, the electrode including:
 a rigid body; and 
 three spring legs coupled to the rigid body and configured to displace the rigid body responsive to an electrostatic force applied to the electrode. 
   
     
     
         2 . The SLM of  claim 1 , wherein the electrode has a hexagonal shape. 
     
     
         3 . The SLM of  claim 1 , wherein the three spring legs partially wrap around a perimeter of the rigid body. 
     
     
         4 . The SLM of  claim 1 , further comprising a base electrode configured to apply a voltage to cause the electrostatic force. 
     
     
         5 . The SLM of  claim 4 , wherein the base electrode is curved away from the rigid body. 
     
     
         6 . The SLM of  claim 4 , wherein the rigid body is curved away from the base electrode. 
     
     
         7 . The SLM of  claim 1 , further comprising a mirror attachment coupled between the mirror and the electrode. 
     
     
         8 . The SLM of  claim 7 , further comprising a spring attachment coupled between the spring legs and a base, wherein the electrode, the mirror attachment and the spring attachment are made of a same material. 
     
     
         9 . The SLM of  claim 8 , wherein the spring attachment is coupled to a ground. 
     
     
         10 . The SLM of  claim 8 , wherein the mirror attachment is shorter than the spring attachment.