Vcsel with elliptical aperture having reduced rin

Abstract

A VCSEL can include: an elliptical oxide aperture in an oxidized region that is located between an active region and an emission surface, the elliptical aperture having a short radius and a long radius with a radius ratio (short radius)/(long radius) being between 0.6 and 0.8, the VCSEL having a relative intensity noise (RIN) of less than −140 dB/Hz. The VCSEL can include an elliptical emission aperture having the same dimensions of the elliptical oxide aperture. The VCSEL can include an elliptical contact having an elliptical contact aperture therein, the elliptical contact being around the elliptical emission aperture. The elliptical contact can be C-shaped. The VCSEL can include one or more trenches lateral of the oxidized region, the one or more trenches forming an elliptical shape, wherein the oxidized region has an elliptical shape. The one or more trenches can be trapezoidal shaped trenches.

1 . A VCSEL comprising:
 an oxidized region that is located between an active region and an emission surface;   one or more trenches lateral of the oxidized region and positioned so as to provide the oxidized region with an elliptical shape so as to form an elliptical oxide aperture.   
     
     
         2 . The VCSEL of  claim 1 , further comprising an elliptical emission aperture having same dimensions of the elliptical oxide aperture. 
     
     
         3 . The VCSEL of  claim 2 , further comprising an elliptical contact having an elliptical contact aperture therein, the elliptical contact disposed around the elliptical emission aperture. 
     
     
         4 . The VCSEL of  claim 3 , wherein the elliptical contact is C-shaped. 
     
     
         5 . The VCSEL of  claim 1 , wherein the elliptical oxide aperture has a short radius and a long radius with a radius ratio (short radius)/(long radius) being from about 0.64 to about 0.75. 
     
     
         6 . The VCSEL of  claim 1 , wherein the one or more trenches are trapezoidal shaped trenches. 
     
     
         7 . The VCSEL of  claim 2 , further comprising a mesa having the elliptical oxide aperture, oxidized region, elliptical emission aperture, elliptical contact, and one or more trenches in the elliptical shape. 
     
     
         8 . The VCSEL of  claim 3 , further comprising a contact pad and an electrical connector that electrically connects the contact pad with the elliptical contact. 
     
     
         9 . The VCSEL of  claim 1 , wherein the VCSEL has a relative intensity noise (RIN) of less than or about −140 dB/Hz. 
     
     
         10 . The VCSEL of  claim 1 , wherein the elliptical oxide aperture has a short radius and a long radius with a radius ratio (short radius)/(long radius) from about 0.6 to about 0.8, and the VCSEL has a relative intensity noise (RIN) of less than or about −140 dB/Hz, and wherein the short radius is about 2.8 microns to about 3.1 microns.