US2021109445A1PendingUtilityA1
Coloring photosensitive composition, cured film, pattern forming method, infrared cut filter with light-shielding film, solid-state imaging device, image display device, and infrared sensor
Est. expiryMar 30, 2035(~8.7 yrs left)· nominal 20-yr term from priority
Inventors:Kazutaka TakahashiDaisuke HamadaShunsuke KitajimaHirokazu KyotaKaoru AoyagiMitsuji Yoshibayashi
G03F 7/105G03F 7/0007H10F 39/8057H10F 39/8053H10F 77/40H10F 39/12G02F 1/133516G02B 5/223G03F 7/027G03F 7/031G02B 5/201G02F 1/1335G02B 5/20G02B 5/208G03F 7/029G03F 7/038G03F 7/004H01L 27/146H01L 27/14621H01L 27/14623H01L 31/0232
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Claims
Abstract
A coloring photosensitive composition includes an oxime ester-based photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and a colorant, in which in a case where a film having a film thickness after drying of 2.0 μm is formed using the coloring photosensitive composition, the optical density of the film at a wavelength of 365 nm is 1.5 or more.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A coloring photosensitive composition comprising:
an oxime ester-based photopolymerization initiator containing a fluorine atom; a polymerizable compound having an ethylenically unsaturated double bond; an alkali-soluble resin; and a colorant, wherein the colorant includes a black pigment; the oxime ester-based photopolymerization initiator containing a fluorine atom has at least one of group containing a fluorine atom selected from an alkyl group having a fluorine atom and a group containing an alkyl group having a fluorine atom; a content of the colorant is 20% to 47.9% by mass with respect to the total solid content of the coloring photosensitive composition; and in a case where a film having a film thickness after drying of 2.0 μm is formed using the coloring photosensitive composition, the optical density of the film at a wavelength of 365 nm is 1.5 or more.
2 . The coloring photosensitive composition according to claim 1 ,
wherein the group containing an alkyl group having a fluorine atom represents at least one group selected from —OR X11 , —SR X11 , —COR X11 , —COOR X11 , —OCOR X11 , —NR X11 R X12 , —NHCOR X11 , —CONR X11 R X12 , —NHCONR X11 R X12 , —NHCOOR X11 , —SO 2 R X11 , —SO 2 OR X11 , and —NHSO 2 R X11 , R X11 represents the alkyl group having a fluorine atom, and R represents a hydrogen atom, an alkyl group, the alkyl group having a fluorine atom, an aryl group, or a heterocyclic group.
3 . The coloring photosensitive composition according to claim 2 ,
wherein the group containing a fluorine atom represents the alkyl group having a fluorine atom or —OR X11 .
4 . The coloring photosensitive composition according to claim 3 ,
wherein the number of carbon atoms of R X11 is 1 to 4.
5 . The coloring photosensitive composition according to claim 4 ,
wherein the group containing a fluorine atom has a terminal structure represented by Formula (1) or (2), and * in the formula represents a linking arm.
*—CHF 2 (1)
*—CF 3 (2)
6 . The coloring photosensitive composition according to claim 1 ,
wherein the oxime ester-based photopolymerization initiator containing a fluorine atom includes a compound represented by Formula (Ia),
in General Formula (Ia), A 1 and A 2 each independently represent an alkyl group, an acyl group, an aryl group, or heterocyclic group, and A 3 represents an alkyl group, an aryl group, or a heterocyclic group, provided that at least one of A 1 , A 2 or A 3 contains a fluorine atom.
7 . The coloring photosensitive composition according to claim 1 ,
wherein the oxime ester-based photopolymerization initiator containing a fluorine atom includes a compound represented by Formula (1),
in Formula (1), Ar 1 and Ar 2 each independently represent an aromatic hydrocarbon ring which may have a substituent,
R 1 represents an aryl group having a group containing a fluorine atom, and
R 2 and R 3 each independently represent an alkyl group or an aryl group.
8 . The coloring photosensitive composition according to claim 7 wherein Ar 2 represents a naphthalene ring which may have a substituent.
9 . The coloring photosensitive composition according to claim 7 , further comprising:
an oxime-based photopolymerization initiator other than the oxime ester-based photopolymerization initiator containing a fluorine atom.
10 . The coloring photosensitive composition according to claim 9 ,
the content of the oxime-based photopolymerization initiator other than the oxime ester-based photopolymerization initiator containing a fluorine atom is 30 to 300 parts by mass with respect to 100 parts by mass of the total amount of the oxime ester-based photopolymerization initiator containing a fluorine atom and the oxime-based photopolymerization initiator other than the oxime ester-based photopolymerization initiator containing a fluorine atom.
11 . The coloring photosensitive composition according to claim 1 , further comprising:
an organic pigment, wherein the ratio A/B of the minimum value A of the absorbance at a wavelength in a range from 400 nm to less than 580 nm to the minimum value B of the absorbance at a wavelength in a range from 580 nm to 750 nm of the coloring photosensitive composition is 0.3 to 3, and the ratio C/D of the minimum value C of the absorbance at a wavelength in a range from 400 nm to 750 nm to the maximum value D of the absorbance at a wavelength in a range from 1,000 nm to 1,300 nm of the coloring photosensitive composition is 5 or more.
12 . The coloring photosensitive composition according to claim 1 , further comprising:
a curable compound having a fluorine atom and a curable functional group.
13 . The coloring photosensitive composition according to claim 1 ,
wherein the black pigment contains carbon black or titanium black.
14 . The coloring photosensitive composition according to claim 13 ,
wherein the black pigment contains titanium black.
15 . The coloring photosensitive composition according to claim 1 ,
wherein the content of the black pigment is 20% to 47.9% by mass with respect to the total solid content of the coloring photosensitive composition.
16 . The coloring photosensitive composition according to claim 1 , further comprising:
an α-aminoketone-based photopolymerization initiator, wherein the mass ratio of the oxime ester-based photopolymerization initiator containing a fluorine atom to the α-aminoketone-based photopolymerization initiator is 1:1.5 to 1:10.
17 . The coloring photosensitive composition according to claim 1 , further comprising:
an oxime-based photopolymerization initiator other than the oxime ester-based photopolymerization initiator containing a fluorine atom.
18 . The coloring photosensitive composition according to claim 1 ,
wherein the total mass of monochlorobenzene and methyl tert-butyl ether is 2 ppm or less with respect to the total mass of the coloring photosensitive composition.
19 . The coloring photosensitive composition according to claim 1 , which is used for i-ray exposure.
20 . The coloring photosensitive composition according to claim 7 ,
wherein a total number of fluorine atoms in the compound represented by Formula (1) is 3 or more.
21 . A cured film using the coloring photosensitive composition according to claim 1 .
22 . The cured film according to claim 21 , which is a color filter or a light-shielding film.
23 . A pattern forming method comprising:
forming a coloring composition layer on a support, using the coloring photosensitive composition according to claim 1 ; exposing the coloring composition layer patternwise; and removing the unexposed area of the coloring composition layer by development to form a colored pattern.
24 . The pattern forming method according to claim 23 , wherein exposure is carried out using an i-ray.
25 . An infrared cut filter comprising:
an infrared cut filter; and a light-shielding film formed by curing the coloring photosensitive composition according to claim 1 , disposed on at least a part of the surface of the infrared cut filter.
26 . A solid-state imaging device comprising the cured film according to claim 21 .
27 . An image display device comprising the cured film according to claim 21 .
28 . An infrared sensor comprising the cured film according to claim 21 .Join the waitlist — get patent alerts
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