Test wafer with optical fiber with bragg grating sensors

Abstract

An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.

What is claimed is: 
     
         1 . An apparatus, comprising:
 a platform;   an optical fiber with Fiber Bragg Grating sensors located over the platform;   patches of adhesive located over the platform and over the optical fiber; and   at least a portion of the Fiber Bragg Grating sensors configured to detect temperature-related information associated with the platform.   
     
     
         2 . The apparatus according to  claim 1 , wherein the at least the portion of the Fiber Bragg Grating sensors is a first portion thereof, the apparatus further comprising:
 a second portion of the Fiber Bragg Grating sensors configured to detect strain-related information associated with a structure to which the platform is capable of being attached;   wherein the second portion of the Fiber Bragg Grating sensors are directly bonded to the platform.   
     
     
         3 . The apparatus according to  claim 1 , wherein the optical fiber is disposed to include a geometric pattern. 
     
     
         4 . The apparatus according to  claim 1 , wherein the optical fiber is disposed to include a spiral or spiral-like pattern. 
     
     
         5 . The apparatus according to  claim 1 , wherein the optical fiber is disposed to include a non-geometric pattern. 
     
     
         6 . The apparatus according to  claim 1 , wherein:
 the platform has a cavity defined therein; and   the optical fiber is positioned at least partially in the cavity.   
     
     
         7 . The apparatus according to  claim 6 , wherein the cavity is a groove or a channel. 
     
     
         8 . The apparatus according to  claim 1 , wherein the optical fiber is stripped of a coating. 
     
     
         9 . The apparatus according to  claim 1 , wherein the optical fiber is disposed over and directly on the platform. 
     
     
         10 . The apparatus according to  claim 1 , wherein the Fiber Bragg Grating sensors are positioned along curved portions of the optical fiber. 
     
     
         11 . The apparatus according to  claim 10 , wherein:
 the platform has a cavity defined therein;   the optical fiber is positioned at least partially in the cavity; and   the optical fiber is disposed in a spiral or spiral-like pattern corresponding to the spiral or spiral-like pattern formed as the cavity in the platform.   
     
     
         12 . The apparatus according to  claim 11 , wherein the optical fiber is located at least partially below an upper surface of the platform. 
     
     
         13 . The apparatus according to  claim 1 , wherein the platform is a wafer. 
     
     
         14 . The apparatus according to  claim 13 , wherein the wafer is a silicon wafer. 
     
     
         15 . The apparatus according to  claim 1 , wherein the optical fiber has a coating. 
     
     
         16 . The apparatus according to  claim 15 , wherein the coating is a fiber coating. 
     
     
         17 . The apparatus according to  claim 15 , wherein the fiber coating is a polyimide coating. 
     
     
         18 . The apparatus according to  claim 1 , further comprising a tube having the optical fiber located therein. 
     
     
         19 . The apparatus according to  claim 18 , wherein the optical fiber is bare fiber inserted inside a hollow metal tube for the tube.