US2021121962A1PendingUtilityA1

Sintering press and pressure sintering method for producing a sintered connection by means of the sintering press

Assignee: SEMIKRON ELEKTRONIK GMBH & KGPriority: Oct 23, 2019Filed: Sep 15, 2020Published: Apr 29, 2021
Est. expiryOct 23, 2039(~13.2 yrs left)· nominal 20-yr term from priority
H10W 72/07141H10W 72/07331H10W 72/07332H10W 72/07188H10W 72/07178H10W 72/352H10W 72/351H10W 72/325H10W 90/734H10W 72/0711H10W 95/00H10P 72/0438B22F 7/08B22F 3/03B22F 7/064H01L 24/32H01L 2224/8384H01L 2224/75744H01L 24/29H01L 24/75H01L 2224/29239H01L 2224/75301H01L 2224/32225H01L 24/83
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Claims

Abstract

A sintering press for producing a sintered connection between a first connection partner and a second connection partner disposed thereabove, having a suction-fixing installation for fixing the first connection partner, having a compression piece which is disposed above the suction-fixing installation. The sintering press for producing the sintered connection is configured for converging the compression piece and the suction-fixing installation relative to one another and for mutually compressing the first connection partner and the second connection partner, wherein the suction-fixing installation on the side thereof that faces the compression piece has first suction openings, wherein the suction-fixing installation, when the first connection partner is disposed above the first suction openings, by generating a negative pressure at the first suction openings, is configured for suctioning the first connection partner and, on account thereof, for fixing the latter in relation to the suction-fixing installation. The invention furthermore relates to a pressure sintering method for producing a sintered connection by the sintering press.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A sintering press for producing a sintered connection between a first connection partner ( 5 ) and a second connection partner ( 6 ) disposed thereabove, having a suction-fixing installation ( 3 ) for fixing the first connection partner ( 5 ), having a compression piece ( 10 ) which is disposed above the suction-fixing installation ( 3 ), wherein:
 said sintering press ( 1 ) for producing the sintered connection, when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ), is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another and, on account thereof, for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 );   the suction-fixing installation ( 3 ) on the side ( 3   a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 );   the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ), by means of generating a negative pressure at the first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).   
     
     
         2 . The sintering press according to  claim 1 , wherein:
 the suction-fixing installation ( 3 ) is disposed on a compression counterpart ( 11 ) of the sintering press ( 1 ), or is an integral component part of a compression counterpart ( 11 ) of the sintering press ( 1 ).   
     
     
         3 . The sintering press according to  claim 1 , wherein:
 the respective cross-sectional area of the first suction openings ( 9 ) is 0.007 mm2 to 3.2 mm 2 , in particular 0.03 mm 2  to 1.8 mm2.   
     
     
         4 . The sintering press according to  claim 3 , wherein:
 the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) has an in particular rectangular fixing region ( 14 ); and   wherein the first suction openings ( 9 ) are disposed within the fixing region ( 14 ), wherein at least some ( 9 ′) of the first suction openings ( 9 ) are disposed in a peripheral region ( 14   c ) of the fixing region ( 14 ) or are disposed in a central region of the fixing region ( 14 ).   
     
     
         5 . The sintering press according to  claim 4 , wherein:
 the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) has a rectangular fixing region ( 14 ); and   wherein the number of first suction openings ( 9 ) in the corner regions ( 14   b ) of the fixing region ( 14 ) is increased in comparison to other regions of the fixing region ( 14 ).   
     
     
         6 . The sintering press according to  claim 5 , wherein:
 the sintering press ( 1 ) has a suction gripper ( 22 ) which, by means of generating a negative pressure at the suction openings ( 24 ) thereof, is configured for (i) thinly holding the first connection partner ( 5 ) directly or indirectly on said suction gripper ( 22 ) and, prior to the pressing procedure, for disposing the first connection partner ( 5 ) conjointly with the second connection partner ( 6 ) disposed above the first connection partner ( 5 ) in the space between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and after the pressing procedure, for (ii) removing said first connection partner ( 5 ) conjointly with said second connection partner ( 6 ) from said space again.   
     
     
         7 . The sintering press according to  claim 6 , wherein:
 the sintering press ( 1 ) for producing the sintered connection, when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and the first connection partner ( 5 ) is disposed directly on the suction-fixing installation ( 3 ), and is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another and, on account thereof, for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 );   wherein the suction-fixing installation ( 3 ) on the side ( 3   a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 ); and   wherein the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ) so as to be directly on the suction-fixing installation ( 3 ), by means of generating a negative pressure at the first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).   
     
     
         8 . The sintering press according to  claim 7 , wherein:
 the suction-fixing installation ( 3 ) on the side ( 3   a ) thereof that faces the compression piece ( 10 ) has at least one second suction opening ( 15 ) for suctioning a film portion ( 4   a ) of a film ( 4 ) when the film portion ( 4   a ) is disposed above the first connection partner ( 5 ) and the second connection partner ( 6 ) and above the at least one second suction opening ( 15 );   wherein the at least one second suction opening ( 15 ) is disposed in such a manner that the first connection partner ( 5 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ), is not disposed above the at least one second suction opening ( 15 ); and   wherein the suction-fixing installation ( 3 ), when the film portion ( 4 a) is disposed above the at least one second suction opening ( 15 ), by means of generating a negative pressure at the at least one second suction opening ( 15 ), is configured for suctioning the film portion ( 4   a ) and, on account thereof, for fixing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by way of the film portion ( 4   a ).   
     
     
         9 . The sintering press according to  claim 8 , wherein:
 a plurality of elastic delimitation elements ( 13 ) are disposed on the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 );   said delimitation elements ( 13 ), when the first connection partner ( 5 ) is disposed directly on the suction-fixing installation ( 3 ), delimit or prevent a movement of the first connection partner ( 5 ) in a direction perpendicular to the normal direction (N 1 ) of the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ).   
     
     
         10 . The sintering press according to  claim 6 , wherein:
 when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and the first connection partner ( 5 ) is disposed directly on a workpiece carrier ( 17 ) and has a plurality of passage openings ( 16 ) so as to be above the passage openings ( 16 ) and the workpiece carrier ( 17 ) is disposed directly on the suction-fixing installation ( 3 ), is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 );   wherein the suction-fixing installation ( 3 ) on the side ( 3   a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 ); and   wherein the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed directly on a workpiece carrier ( 17 ) has a plurality of passage ducts ( 16 ) so as to be above the passage ducts ( 16 ) and the workpiece carrier ( 17 ) is disposed directly on the suction-fixing installation ( 3 ) in such a manner that the passage ducts ( 16 ) are disposed so as to be in alignment with the first suction openings ( 9 ), by means of generating a negative pressure at the first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).   
     
     
         11 . The sintering press according to  claim 10 , wherein:
 the suction-fixing installation ( 3 ) on the side ( 3   a ) thereof that faces the compression piece ( 10 ) has at least one second suction opening ( 15 ′) for fixing the workpiece carrier ( 17 ) when the latter is disposed directly on the suction-fixing installation ( 3 ); and   wherein the suction-fixing installation ( 3 ), when the workpiece carrier ( 17 ) is disposed above the at least one second suction opening ( 15 ′), by means of generating a negative pressure at the at least one second suction opening ( 15 ′), is configured for suctioning the workpiece carrier ( 17 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).   
     
     
         12 . The sintering press according to  claim 11 , wherein:
 a frame element ( 29 ) encircles the first connection partner ( 5 ) and is movable in relation to the workpiece carrier ( 17 ) at least in the normal direction (N 1 ) of the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) is disposed on the workpiece carrier ( 17 ); and   wherein the frame element ( 29 ) on the side thereof that faces the suction-fixing installation ( 3 ) has ventilation trenches ( 29   a ) which in the direction perpendicular to the normal direction (N 1 ) of the side ( 3   a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) run through the frame element ( 29 ).   
     
     
         13 . A pressure sintering method for producing a sintered connection between a first connection partner ( 5 ) and a second connection partner ( 6 ) disposed thereabove by means of a sintering press ( 1 ) which is configured according to  claim 1 , said method comprising the following method steps in succession:
 a) disposing between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) the first connection partner ( 5 ) conjointly with the second connection partner ( 6 ) disposed above the first connection partner ( 5 ), wherein a sintering material ( 7 ) to be sintered is disposed between the first connection partner ( 5 ) and the second connection partner ( 6 ), wherein the first connection partner ( 5 ) is disposed above the first suction openings ( 9 );   b) fixing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by suctioning the first connection partner ( 5 ) by means of generating a negative pressure at the first suction openings ( 9 );   c) impinging the first connection partner ( 5 ) and the second connection partner ( 6 ) and the sintering material ( 7 ) with a pressure by converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another, wherein, on account thereof, the first connection partner ( 5 ) and the second connection partner ( 6 ) are mutually compressed, and impinging the sintering material ( 7 ) with a temperature, wherein the sintering material ( 7 ) on account of the impingement with pressure and temperature is converted to a sintered metal;   d) diverging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another;   e) releasing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by reinstating the gas pressure prevailing above the first connection partner ( 5 ) at the first suction openings ( 9 ).   
     
     
         14 . The pressure sintering method according to  claim 13 , wherein:
 between method steps a) and b), or between method steps b) and c), a film portion ( 4   a ) of a film ( 4 ) is disposed on the first connection partner ( 5 ) and the second connection partner ( 6 ).   
     
     
         15 . The pressure sintering method according to  claim 14 , wherein:
 between method steps d) and e) the film portion ( 4 a) is removed from the first connection partner ( 5 ) and the second connection partner ( 6 ).   
     
     
         16 . The pressure sintering method according to  claim 15 , wherein the sintering press ( 1 ) is configured according to  claim 7 , wherein:
 in method step a) the first connection partner ( 5 ) is disposed directly on the suction-fixing installation ( 3 ).   
     
     
         17 . The pressure sintering method according to  claim 15 , wherein:
 the sintering press ( 1 ) is configured according to  claim 12 ; and   wherein in method step (a) the first connection partner ( 5 ) is disposed directly on the workpiece carrier ( 17 ) having passage ducts ( 16 ) so as to be above the passage ducts ( 16 ), and the workpiece carrier ( 17 ) is disposed directly on the suction-fixing installation ( 3 ) in such a manner that the passage ducts ( 16 ) are disposed so as to be in alignment with the first suction openings ( 9 ).

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