Single-axis actuator, acoustic wave generator and its array

Abstract

The present invention provides a single-axis actuator. The single-axis actuator includes: a substrate; a driving capacitor; an actuating end driven by the driving capacitor; and a first pair of resilient elements connecting the actuating end and the substrate for effecting a parametric characteristic of the single-axis actuator to apply to an generation of an acoustic wave.

What is claimed is: 
     
         1 . An acoustic wave generator, comprising:
 a single-axis actuator including:   a substrate;   a driving capacitor;   a first actuating end driven by the driving capacitor; and   a first pair of resilient elements connecting the first actuating end and the substrate, wherein the first pair of resilient elements are provided for determining a frequency response of the acoustic wave generator; and   a plate mounted on and driven by the first actuating end to generate an acoustic wave.   
     
     
         2 . The acoustic wave generator as claimed in  claim 1 , further comprising a second single-axis actuator having a second actuating end, wherein the plate is also mounted on and driven by the second actuating end. 
     
     
         3 . The acoustic wave generator as claimed in  claim 1 , further comprising a second, a third and a fourth single-axis actuators having a second, a third and a fourth actuating ends respectively, wherein the plate is also mounted on and driven by the second, the third and the fourth actuating ends. 
     
     
         4 . The acoustic wave generator as claimed in  claim 1 , wherein each of the first pair of resilient elements includes a wire electrically connected to a pad on the first actuating end. 
     
     
         5 . The acoustic wave generator as claimed in  claim 1 , wherein each of the first pair of resilient elements is electrically connected to a pad-anchor on the substrate. 
     
     
         6 . The acoustic wave generator as claimed in  claim 1 , wherein the plate include a plurality of holes, and the first actuating end is a T-bar. 
     
     
         7 . The acoustic wave generator as claimed in  claim 6 , wherein the T-bar is connected to the substrate through a fulcrum hinge having a first and a second sides, a first resilient element of the first pair of resilient elements is disposed on the first side of the fulcrum hinge, and a second resilient element of the first pair of resilient elements is disposed on the second side of the fulcrum hinge. 
     
     
         8 . The acoustic wave generator as claimed in  claim 7 , wherein the fulcrum hinge is configured to prevent the plate from peeling off from the T-bar when there is a shear force at a boundary surface between the plate and the T-bar. 
     
     
         9 . An array comprising a plurality of the acoustic wave generators as claimed in  claim 1 . 
     
     
         10 . A single-axis actuator, comprising:
 a substrate;   a driving capacitor;   an actuating end driven by the driving capacitor; and   a first pair of resilient elements connecting the actuating end and the substrate for effecting a parametric characteristic of the single-axis actuator.   
     
     
         11 . The single-axis actuator as claimed in  claim 10 , wherein the parametric characteristic is an electrical or heat conductivity of the first pair of resilient elements, or a stiffness related to a vibrational response. 
     
     
         12 . The single-axis actuator as claimed in  claim 11 , wherein when the single-axis actuator is applied in an acoustic wave generator, the vibrational response determines a magnitude of an acoustic pressure. 
     
     
         13 . The single-axis actuator as claimed in  claim 10 , wherein the substrate has a front surface and a rear surface, and a cavity penetrates through the front and the rear surfaces. 
     
     
         14 . The single-axis actuator as claimed in  claim 10 , wherein the substrate has an electronic element. 
     
     
         15 . The single-axis actuator as claimed in  claim 10 , wherein each of the first pair of resilient elements includes a wire electrically connected to a pad on the actuating end. 
     
     
         16 . The single-axis actuator as claimed in  claim 10 , wherein each of the first pair of resilient elements is electrically connected to a pad-anchor on the substrate. 
     
     
         17 . The single-axis actuator as claimed in  claim 10 , wherein the actuating end is a T-bar. 
     
     
         18 . The single-axis actuator as claimed in  claim 17 , wherein the T-bar is connected to the substrate through a fulcrum hinge having a first and a second sides, a first resilient element of the first pair of resilient elements is disposed on the first side of the fulcrum hinge, and a second resilient element of the first pair of resilient elements is disposed on the second side of the fulcrum hinge. 
     
     
         19 . The single-axis actuator as claimed in  claim 18 , wherein the fulcrum hinge is configured to prevent an object carried by the actuating end from peeling off from the T-bar when there is a shear force at a boundary surface between the object and the T-bar. 
     
     
         20 . The single-axis actuator as claimed in  claim 18 , wherein the driving capacitor is a comb-type driving capacitor including a fixed electrode structure fixed to the substrate and a movable electrode structure connected to the fulcrum hinge.