US2021151567A1PendingUtilityA1
Indium-gallium-nitride structures and devices
Est. expiryNov 19, 2039(~13.3 yrs left)· nominal 20-yr term from priority
Inventors:Michael R. Krames
H10P 14/3416H10P 14/3251H10P 14/3248H10P 14/3238H10P 14/3216H10P 14/276H10P 14/274H10P 14/24H10P 14/278H01S 5/34333H10H 20/818H10H 20/825C30B 35/00C30B 29/38H10D 62/8503H10D 62/405H10H 20/817H10D 62/824H01L 29/2003H01L 33/32H01L 21/02647H01L 29/205H01L 29/045H01L 21/02505H01L 21/02458H01L 21/02645H01L 21/02502H01L 21/0254H01L 21/02488
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Abstract
InGaN layers characterized by an in-plane lattice constant within a range from 3.19 to 3.50 Å are disclosed. The InGaN layers are grown by coalescing InGaN grown on a plurality of GaN regions. The InGaN layers can be used to fabricate optical and electronic devices for use in light sources for illumination and display applications.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method of making a III-nitride semiconductor structure, wherein the method comprises:
forming only one plurality of seed regions on a substrate; wherein,
each seed region of the only one plurality of seed regions comprises a semiconductor material having a Wurtzite crystal structure;
each seed region of the only one plurality of seed regions has only one plurality of planar seed interfaces comprising a heterojunction underlying the InGaN region;
each planar seed interface of the only one plurality of planar seed interfaces has a crystallographically equivalent orientation and is characterized by a crystallographic plane; and
the crystallographic plane is not parallel to a (0001) crystallographic plane of the (0001) InGaN region; and
growing a semiconductor material on the plurality of planar seed interfaces to provide a (0001) InGaN region, wherein the (0001) InGaN region is characterized by an in-plane a-lattice constant, wherein the in-plane a-lattice constant is greater than 3.19 Å.Cited by (0)
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