Method for Producing Piezoelectric Actuator

Abstract

A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

What is claimed is: 
     
         1 . A method for producing a piezoelectric actuator, comprising:
 forming a vibration plate;   forming a first electrode on the vibration plate;   forming a piezoelectric layer on the first electrode; and   forming a second electrode on the piezoelectric layer, wherein   the forming the vibration plate has a single layer forming step including
 forming a metal layer containing zirconium by a gas phase method, and 
 forming a metal oxide layer by firing the metal layer, 
   the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and   the metal oxide layer has a thickness less than 200 nm.   
     
     
         2 . The method for producing a piezoelectric actuator according to  claim 1 , wherein the metal oxide layer has a thickness of 50 nm or more. 
     
     
         3 . The method for producing a piezoelectric actuator according to  claim 1 , wherein the metal oxide layer has a thickness of 150 nm or less. 
     
     
         4 . The method for producing a piezoelectric actuator according to  claim 1 , wherein the metal oxide layer has a columnar crystal structure. 
     
     
         5 . The method for producing a piezoelectric actuator according to  claim 1 , wherein the metal oxide layer is a zirconium oxide layer, and in X-ray diffraction of the metal oxide layer, a ratio of an intensity of a peak attributed to a (− 211 ) plane to an intensity of a peak attributed to a (− 111 ) plane is 0.36 or less. 
     
     
         6 . The method for producing a piezoelectric actuator according to  claim 5 , wherein a position of the peak attributed to the (− 111 ) plane is 28.1° or more and 28.5° or less, and a position of the peak attributed to the (− 211 ) plane is 40.4° or more and 41.4° or less. 
     
     
         7 . The method for producing a piezoelectric actuator according to  claim 5 , wherein
 an intensity of a peak attributed to a ( 111 ) plane is higher than the intensity of the peak attributed to the (− 211 ) plane, and   a position of the peak attributed to the ( 111 ) plane is 29.5° or more and 30.5° or less.