Substrate of an optical electrical module

Abstract

A substrate of an optical electrical module is provided. The substrate includes a plurality of accommodating grooves and a reflective groove. The accommodating grooves respectively extend along a first direction. The reflective groove is connected with the accommodating grooves and extends along a second direction perpendicular to the first direction.

What is claimed is: 
     
         1 . A substrate of an optical electrical module, comprising:
 a plurality of accommodating grooves respectively extending along a first direction; and   a reflective groove connected with the accommodating grooves and extending along a second direction perpendicular to the first direction.   
     
     
         2 . The substrate of the optical electrical module as claimed in  claim 1 , wherein the substrate is a (100) silicon wafer. 
     
     
         3 . The substrate of the optical electrical module as claimed in  claim 1 , wherein a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 μm, respectively. 
     
     
         4 . The substrate of the optical electrical module as claimed in  claim 3 , wherein the depth of each of the accommodating grooves and the depth of the reflective groove are the same. 
     
     
         5 . The substrate of the optical electrical module as claimed in  claim 1 , wherein side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°. 
     
     
         6 . The substrate of the optical electrical module as claimed in  claim 1 , wherein the accommodating grooves are parallel to each other. 
     
     
         7 . The substrate of the optical electrical module as claimed in  claim 1 , wherein all the accommodating grooves are perpendicular to the reflective groove.