US2021249603A1PendingUtilityA1

Mask assembly and method for manufacturing of the same

Assignee: SAMSUNG DISPLAY CO LTDPriority: Feb 7, 2020Filed: Aug 10, 2020Published: Aug 12, 2021
Est. expiryFeb 7, 2040(~13.5 yrs left)· nominal 20-yr term from priority
H10K 71/00H10K 71/166C23C 14/042C23C 14/24G03F 7/12H01L 51/001H01L 51/56H01L 51/0011H10P 72/70C23C 16/042H10K 71/164
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Claims

Abstract

A mask assembly and method for manufacturing of the same are provided. A mask assembly includes: a mask frame including a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar; a first split mask overlapping the first mask opening; and a second split mask overlapping the second mask opening, and the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A mask assembly comprising:
 a mask frame comprising a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar;   a first split mask overlapping the first mask opening; and   a second split mask overlapping the second mask opening,   wherein the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.   
     
     
         2 . The mask assembly of  claim 1 , wherein the mask frame comprises:
 a first side extending in a second direction intersecting the first direction; and   a second side in parallel with the first side and spaced apart from the first side,   wherein the support bar is between the first side and the second side.   
     
     
         3 . The mask assembly of  claim 2 , wherein a first end of the first split mask overlaps the first side and a second end of the first split mask overlaps the support bar, and
 wherein a first end of the second split mask overlaps the support bar and a second end of the second split mask overlaps the second side.   
     
     
         4 . The mask assembly of  claim 3 , wherein the first split mask comprises:
 first fixing portions overlapping the first side and the support bar, respectively;   first deposition pattern portions between the first fixing portions and comprising a plurality of first pattern openings; and   first rib portions between the first deposition pattern portions.   
     
     
         5 . The mask assembly of  claim 4 , wherein the second split mask comprises:
 second fixing portions overlapping the second side and the support bar, respectively;   second deposition pattern portions between the second fixing portions and comprising a plurality of second pattern openings; and   second rib portions between the second deposition pattern portions.   
     
     
         6 . The mask assembly of  claim 5 , wherein the first fixing portion overlapping the support bar and the second fixing portion overlapping the support bar are adjacent to each other and spaced apart from each other in a region overlapping the support bar. 
     
     
         7 . The mask assembly of  claim 5 , wherein the first split mask comprises a first welding portion on the first fixing portion overlapping the first side, and a second welding portion on the first fixing portion overlapping the support bar, and
 wherein the second split mask comprises a third welding portion on the second fixing portion overlapping the support bar, and a fourth welding portion on the second fixing portion overlapping the second side.   
     
     
         8 . The mask assembly of  claim 7 , wherein the first split mask further comprises a first half-etched portion at least at one of the first and second ends of the first split mask, and the second split mask further comprises a second half-etched portion at least at one of the first and second ends of the second split mask. 
     
     
         9 . The mask assembly of  claim 8 , wherein the first half-etched portion of the first split mask overlaps the support bar and the first fixing portion of the first split mask, and
 wherein the second half-etched portion of the second split mask overlaps the support bar and the second fixing portion of the second split mask.   
     
     
         10 . The mask assembly of  claim 9 , wherein the first half-etched portion of the first split mask overlaps the second welding portion, and the second half-etched portion of the second split mask overlaps the third welding portion. 
     
     
         11 . The mask assembly of  claim 8 , wherein the first half-etched portion of the first split mask overlaps the first side and the first fixing portion of the first split mask, and the second half-etched portion of the second split mask overlaps the second side and the second fixing portion of the second split mask. 
     
     
         12 . The mask assembly of  claim 11 , wherein the first half-etched portion of the first split mask overlaps the first welding portion, and the second half-etched portion of the second split mask overlaps the fourth welding portion. 
     
     
         13 . The mask assembly of  claim 8 , wherein a thickness of the first half-etched portion is 30% to 70% of a thickness of the first split mask, and a thickness of the second half-etched portion is 30% to 70% of a thickness of the second split mask. 
     
     
         14 . The mask assembly of  claim 8 , wherein the first half-etched portion is continuous or spaced apart from a side of the first split mask facing the second split mask, and the second half-etched portion is continuous or spaced apart from a side of the second split mask facing the first split mask. 
     
     
         15 . The mask assembly of  claim 7 , wherein the first split mask further comprises a first dummy pattern portion at least at one of the first and second ends of the first split mask, and the second split mask further comprises a second dummy pattern portion at least at one of the first and second ends of the second split mask. 
     
     
         16 . The mask assembly of  claim 15 , wherein the first dummy pattern portion of the first split mask is between the second welding portion and the first fixing portion, and the second dummy pattern portion of the second split mask is disposed between the third welding portion and the second fixing portion. 
     
     
         17 . The mask assembly of  claim 16 , wherein the first dummy pattern portion of the first split mask does not overlap the second welding portion of the first split mask and overlaps the support bar, and the second dummy pattern portion of the second split mask does not overlap the third welding portion of the second split mask and overlaps the support bar. 
     
     
         18 . The mask assembly of  claim 15 , wherein the first dummy pattern portion of the first split mask is between the first welding portion and the first fixing portion, and the second dummy pattern portion of the second split mask is between the fourth welding portion and the second fixing portion. 
     
     
         19 . The mask assembly of  claim 18 , wherein the first dummy pattern portion of the first split mask does not overlap the first welding portion of the first split mask and overlaps the first side, and the second dummy pattern portion of the second split mask does not overlap the fourth welding portion of the second split mask and overlaps the second side. 
     
     
         20 . The mask assembly of  claim 15 , wherein the first dummy pattern portion and the second dummy pattern portion comprise at least one first dummy pattern portion and at least one second dummy pattern portion, respectively. 
     
     
         21 . A method of manufacturing a mask assembly, the method comprising:
 preparing a mask frame comprising a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar;   aligning a split mask so as to overlap the first mask opening and the second mask opening and coupling the split mask to the mask frame; and   cutting a region of the split mask corresponding to the support bar to divide the split mask into a first split mask and a second split mask.   
     
     
         22 . The method of  claim 21 , wherein the mask frame comprises:
 a first side extending in a second direction intersecting the first direction; and   a second side in parallel with the first side and spaced apart from the first side,   wherein the support bar is between the first side and the second side.   
     
     
         23 . The method of  claim 22 , wherein the coupling the split mask to the mask frame comprises:
 performing first welding on a first end of the split mask overlapping the first side;   performing second welding on a first region of the split mask overlapping the support bar;   performing third welding on a second region of the split mask overlapping the support bar; and   performing fourth welding on a second end of the split mask overlapping the second side.   
     
     
         24 . The method of  claim 23 , wherein the dividing the split mask into the first split mask and the second split mask comprises:
 cutting between a second welding portion formed by the second welding and a third welding portion formed by the third welding in the split mask.   
     
     
         25 . A method of manufacturing a mask assembly, the method comprising:
 preparing a mask frame comprising a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar;   aligning a first split mask so as to overlap the first mask opening and the second mask opening and coupling two regions of the first split mask adjacent to the first mask opening to the mask frame;   cutting a region of the first split mask corresponding to the support bar;   aligning a second split mask so as to overlap the first split mask and the second mask opening, and coupling two regions of the second split mask adjacent to the second mask opening to the mask frame; and   cutting a region of the second split mask corresponding to the support bar.   
     
     
         26 . The method of  claim 25 , wherein the mask frame comprises:
 a first side extending in a second direction intersecting the first direction; and   a second side in parallel with the first side and spaced apart from the first side,   wherein the support bar is between the first side and the second side.   
     
     
         27 . The method of  claim 26 , wherein the coupling the first split mask to the mask frame comprises:
 performing first welding on an end of the first split mask overlapping the first side; and   performing second welding on a region of the first split mask overlapping the support bar.   
     
     
         28 . The method of  claim 27 , wherein the cutting the first split mask comprises cutting between the second mask opening and a second welding portion of the first split mask formed by the second welding. 
     
     
         29 . The method of  claim 28 , wherein the coupling the second split mask to the mask frame comprises:
 performing third welding on a region of the second split mask overlapping the support bar; and   performing fourth welding on an end of the second split mask overlapping the second side.   
     
     
         30 . The method of  claim 29 , wherein the cutting the second split mask comprises cutting between the first mask opening and a third welding portion of the second split mask formed by the third welding.

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