Diamond Coated Electrodes for Electrochemical Processing and Applications Thereof

Abstract

An electrode for an ozone generator or chlorine generator includes an electrically conductive substrate, a doped-Si layer disposed over the conductive substrate, and a boron-doped diamond (BDD) layer disposed over the doped-silicon layer. The doped-silicon layer defines a discrete architecture that maintains adhesion throughout a high temperature CVD boron-doped diamond process. Another electrode having a PVD nitrogen-doped diamond (ta-C:N) layer disposed over a conductive substrate is also provided.

1 .- 7 . (canceled) 
     
     
         8 . An electrode for an ozone generator or chlorine generator, the electrode comprising:
 an electrically conductive substrate;   a physical vapor deposited nitrogen-doped diamond (ta-C:N) layer disposed over the electrically conductive substrate.   
     
     
         9 . The electrode of  claim 8  wherein the substrate is a doped-silicon substrate or doped-silicon coating on an electrically conductive substrate 
     
     
         10 . The electrode of  claim 8  wherein the ta-C:N layer has a thickness from 10 nm to 5 microns. 
     
     
         11 . The electrode of  claim 8  wherein the thickness is achieved by depositing the ta-C:N in a discrete architecture. 
     
     
         12 . The electrode of  claim 8  wherein the electrically conductive substrate can also act as an electrical contact between a power source and the ta-C:N catalyst.