Optical device having a substrate and a laser unit that emits light into the substrate

Abstract

An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.

What is claimed is: 
     
         1 . An optical device comprising:
 a first substrate formed of a semiconductor material and comprising a first surface and a second surface, the first substrate comprising:
 a laser unit having an active layer laminated between the first surface and the second surface and configured to emit light into the first substrate from the active layer, 
 a first mirror configured to reflect the light emitted from the laser unit toward the second surface, and 
 a convex lens integrally provided within a region of the second surface and configured to propagate the light, reflected from the first mirror, toward a second mirror; 
   the second mirror configured to reflect the light, received from the convex lens, toward a third mirror;   the third mirror configured to reflect the light, reflected from the second mirror, toward a second substrate; and   the second substrate comprises a grating coupler and an optical waveguide,
 wherein the light, incident on the grating coupler, propagates through the optical waveguide. 
   
     
     
         2 . The optical device of  claim 1 , further comprising:
 an isolator disposed between on a light path between the second mirror and the third mirror.   
     
     
         3 . The optical device of  claim 1 , further comprising:
 a third substrate, fixed to the second substrate, configured to hold the second mirror.   
     
     
         4 . The optical device of  claim 3 , further comprising:
 a fourth substrate, fixed to the second substrate, configured to hold the third mirror.   
     
     
         5 . The optical device of  claim 1 , wherein an electrode is disposed on the second surface. 
     
     
         6 . The optical device of  claim 5 , further comprising:
 a laser submount is disposed to the electrode.   
     
     
         7 . The optical device of  claim 6 , wherein the laser submount is fixed to a third substrate configured to hold the second mirror. 
     
     
         8 . The optical device of  claim 5 , wherein the electrode is a first electrode, and
 wherein the optical device further comprises:
 a second electrode disposed on the first surface,
 wherein the first electrode and the second electrode are used inject a current into the active layer. 
 
   
     
     
         9 . The optical device of  claim 1 , wherein the second mirror is configurable to adjust an angle of the second mirror. 
     
     
         10 . The optical device of  claim 1 , wherein the second mirror comprises a micro electro mechanical systems (MEMS) structure. 
     
     
         11 . The optical device of  claim 1 , wherein the third mirror is configurable to adjust an angle of the third mirror. 
     
     
         12 . The optical device of  claim 1 , wherein the third mirror comprises a micro electro mechanical systems (MEMS) structure. 
     
     
         13 . The optical device of  claim 1 , wherein the light propagated from the convex lens is converged. 
     
     
         14 . The optical device of  claim 1 , wherein the light propagated from the convex lens is parallelized. 
     
     
         15 . The optical device of  claim 1 , wherein a normal line of a plane of the first mirror obliquely intersects an optical axis of the light, emitted from the laser unit, at 45 degrees. 
     
     
         16 . The optical device of  claim 1 , wherein an optical axis of the light, reflected from the first mirror and passing through the convex lens, penetrates a center of the convex lens. 
     
     
         17 . The optical device of  claim 1 , wherein a diameter of the convex lens is 90 μm. 
     
     
         18 . The optical device of  claim 1 , wherein a radius of curvature of the convex lens is 125 μm. 
     
     
         19 . The optical device of  claim 1 , wherein the optical waveguide has a triangular shape. 
     
     
         20 . The optical device of  claim 1 , wherein the optical waveguide is a first optical waveguide; and
 wherein the second substrate further comprises:   
       a second optical waveguide disposed to be in contact with the first optical waveguide.