Positioning system for components of optical systems

Abstract

A positioning system for an optical system can include a support frame and a flexure arrangement. The flexure arrangement can be configured to secure an optical-system component relative to a support frame, with the optical-system component in a first orientation. The flexure arrangement can be configured to resiliently deform, upon application of a transient stress to the optical system, to move the optical-system component relative to the support frame along at least one degree of freedom. The flexure arrangement can be configured to return the optical-system component to the first orientation upon removal of the transient stress.

1 - 6 . (canceled) 
     
     
         7 . A positioning system for a three-dimensional (3D) measurement system that includes a first optical component of a first optical system, and a second optical component of a second optical system, the first optical system being configured to interoperate with the second optical system to execute 3D measurements, the positioning system comprising:
 a support frame;   a first flexure arrangement configured to secure the first optical component relative to the support frame, the first flexure arrangement including a plurality of flexures that permit two-dimensional (2D) movement of the first optical component within a first plane and that prevent movement of the first optical component out of the first plane, in response to transient stresses on the 3D measurement system; and   a second flexure arrangement, spaced apart from the first flexure arrangement along the support frame, the second flexure arrangement including a fixed constraint at which the second optical component is directly secured to the support frame and a single flexure arm that is secured to the second optical component opposite the fixed constraint, directs movement of the second optical component substantially along a single movement dimension within a second plane, and prevents movement of the second optical component out of the second plane, in response to transient stresses on the 3D measurement system.   
     
     
         8 . The positioning system of  claim 7 , wherein the first flexure arrangement and the second flexure arrangement are integrally formed with the support frame. 
     
     
         9 . The positioning system of  claim 7 , wherein the plurality of flexures of the first flexure arrangement are rigidly and non-rotatably secured to the first optical component. 
     
     
         10 . The positioning system of  claim 9 , wherein each flexure of the plurality of flexures of the first flexure arrangement includes a free end with an aperture. 
     
     
         11 . The positioning system of  claim 10 , further comprising a substrate coupled to the first optical component, and
 wherein each free end of each flexure of the plurality of flexures of the first flexure arrangement is coupled to the substrate, and   wherein each aperture of each flexure of the plurality of flexures of the first flexure arrangement is configured to receive an adhesive to secure the substrate to each flexure.   
     
     
         12 . The positioning system of  claim 7 , further comprising a substrate coupled to the first optical component, and
 wherein each flexure of the plurality of flexures of the first flexure arrangement are integrally formed with the substrate.   
     
     
         13 . The positioning system of  claim 7 , wherein the first flexure arrangement includes:
 a first flexure arm of the first flexure arrangement that extends from the support frame in a first direction, the first flexure arm extending from a first portion of the support frame;   a second flexure arm of the first flexure arrangement that extends from the support frame in a second direction that is substantially perpendicular to the first direction; and   a third flexure arm extending from the support frame in the second direction, the third flexure arm being spaced apart from the second flexure arm in the first direction, the second and third flexure arms extending from a second portion of the support frame that extends substantially perpendicularly to the first portion of the support frame.   
     
     
         14 . The positioning system of  claim 7 , wherein the second flexure arrangement includes:
 a first threaded fastener that secures the single flexure arm to the second optical component; and   a second threaded fastener that directly secures the support frame to the second optical component at the fixed constraint, opposite the location of the first threaded fastener.   
     
     
         15 . The positioning system of  claim 14 , wherein a reference line is defined between the fixed constraint and an attachment point of the single flexure arm to the second optical component, and
 wherein the reference line coincides with the single movement dimension, and   wherein the reference line is substantially perpendicular to an elongate direction of the single flexure arm.   
     
     
         16 . The positioning system of  claim 7 , wherein the first optical component is at least one of an imaging sensor, or a projection target. 
     
     
         17 . A positioning system for a three-dimensional (3D) measurement system that includes an imaging system with an optical component and a lens arrangement that defines a focal plane, the imaging system being configured to operate for execution of 3D measurements, the positioning system comprising:
 a support frame;   a first flexure arrangement configured to secure the optical component relative to the support frame, the first flexure arrangement including a plurality of flexures that permit two-dimensional (2D) movement of the optical component within the focal plane and that prevent movement of the optical component out of the focal plane, in response to transient stresses on the 3D measurement system, wherein the first flexure arrangement includes:
 a first flexure arm of the first flexure arrangement that extends from the support frame in a first direction, the first flexure arm extending from a first portion of the support frame; 
 a second flexure arm of the first flexure arrangement that extends from the support frame in a second direction that is substantially perpendicular to the first direction; and 
 a third flexure arm extending from the support frame in the second direction, the third flexure arm being spaced apart from the second flexure arm in the first direction, the second and third flexure arms extending from a second portion of the support frame that extends substantially perpendicularly to the first portion of the support frame. 
   
     
     
         18 . The positioning system of  claim 17 , wherein the first flexure arm, the second flexure arm, and the third flexure arm are integrally formed with the support frame. 
     
     
         19 . The positioning system of  claim 17 , wherein the first flexure arm is secured to the optical component at a first attachment point,
 wherein the second flexure arm is secured to the optical component at a second attachment point,   wherein the third flexure arm is secured to the optical component at a third attachment point,   wherein the first attachment point is disposed on a first reference line, and   wherein the second and third attachment points are disposed on a second reference line that is perpendicular to the first reference line.   
     
     
         20 . The positioning system of  claim 19 , wherein at least one of:
 the first reference line is a centerline of the optical component; or   the second reference line is a centerline of the optical component.   
     
     
         21 . The positioning system of  claim 17 , wherein the optical component is a first optical component, and further comprising:
 a second flexure arrangement, spaced apart from the first flexure arrangement along the support frame, the second flexure arrangement being configured to secure a second optical component relative to the support frame, the second flexure arrangement including:
 a first single flexure arm that extends from the support frame to a free end that is coupled to a first end of the second optical component; and 
 a first fixed constraint, at which an opposite second end of the second optical component is fixed directly to the support frame; and 
   a third flexure arrangement, spaced apart from the second flexure arrangement along the support frame so that the second flexure arrangement is positioned between the first and third flexure arrangements, the third flexure arrangement being configured to secure a third optical component relative to the support frame, the third flexure arrangement including:
 a second single flexure arm that extends from the support frame to a free end that is coupled to a first end of the third optical component; and 
 a second fixed constraint, at which an opposite second end of the third optical component is fixed directly to the support frame. 
   
     
     
         22 . The positioning system of  claim 17 , wherein the optical component is at least one of an imaging sensor, or a projection target. 
     
     
         23 . A positioning system for a three-dimensional (3D) measurement system that includes an imaging system with an optical component and a lens arrangement that defines a focal plane, the imaging system being configured to operate for execution of 3D measurements, the positioning system comprising:
 a support frame;   a first flexure arrangement configured to secure the optical component relative to the support frame, the first flexure arrangement including a plurality of flexures that permit two-dimensional (2D) movement of the optical component within the focal plane and that prevent movement of the optical component out of the focal plane, in response to transient stresses on the 3D measurement system,   wherein each of at least two flexure arms of the plurality of flexures of the first flexure arrangement is secured to the optical component at a respective attachment point,   wherein each of the attachment points is disposed on a first reference line that extends perpendicularly to an optical axis within the focal plane, and   wherein an additional flexure arm included in the plurality of flexures of the first flexure arrangement is secured to the optical component at an attachment point that is disposed on a second reference line that is substantially perpendicular to the first reference line and extends through the optical axis within the focal plane.   
     
     
         24 . The positioning system of  claim 23 , wherein each flexure arm of the plurality of flexures is integrally formed with the support frame. 
     
     
         25 . The positioning system of  claim 23 , wherein each flexure arm of the plurality of flexures is rigidly and non-rotatably secured to the optical component. 
     
     
         26 . The positioning system of  claim 23 , wherein the optical component is a first optical component, and further comprising:
 a second flexure arrangement, spaced apart from the first flexure arrangement along the support frame, the second flexure arrangement being configured to secure a second optical component relative to the support frame, the second flexure arrangement including:
 a first single flexure arm that extends from the support frame to a free end that is coupled to a first end of the second optical component; and 
 a first fixed constraint, at which an opposite second end of the second optical component is fixed directly to the support frame; and 
   a third flexure arrangement, spaced apart from the second flexure arrangement along the support frame so that the second flexure arrangement is positioned between the first and third flexure arrangements, the third flexure arrangement being configured to secure a third optical component relative to the support frame, the third flexure arrangement including:
 a second single flexure arm that extends from the support frame to a free end that is coupled to a first end of the third optical component; and 
 a second fixed constraint, at which an opposite second end of the third optical component is fixed directly to the support frame. 
   
     
     
         27 . The positioning system of  claim 26 , wherein the first optical component is a projection target, the second optical component is a first imaging sensor, and the third optical component is a second imaging sensor. 
     
     
         28 . The positioning system of  claim 26 , further comprising:
 a substrate coupled to the first optical component, each flexure arm being integrally formed with the substrate;   a first printed circuit board (PCB) coupled to the second optical component, the first single flexure arm being integrally formed with the first PCB; and   a second PCB coupled to the third optical component, the second single flexure arm being integrally formed with the second PCB.   
     
     
         29 . The positioning system of  claim 23 , further comprising a substrate coupled to the optical component, and to each flexure arm of the first flexure arrangement,
 wherein each flexure arm of the first flexure arrangement includes a respective notch, and   wherein the substrate engages each flexure arm at the respective notch to provide further stability for the substrate.