Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation

Abstract

A method is provided for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads, the pump including a stator, a pumping stage, two shafts extending into the stage and respectively bearing a rotor to rotate synchronously in opposite directions in the stator and to drive a gas from a suction inlet to a delivery outlet, a cooling element coupled to the stator, a temperature sensor to measure a stator temperature, and a controller to control the stator temperature by the cooling element and the temperature sensor; and the method including controlling the pump temperature by the cooling element based on a temperature setpoint and a measurement of the stator temperature, and monitoring whether a value of a pumping load parameter is below a load threshold and, if so, increasing the setpoint. A vacuum pump and a system are also provided.

1 .- 10 . (canceled) 
     
     
         11 . A method for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads,
 the vacuum pump comprising:
 a stator, 
 at least one pumping stage, 
 two shafts extending into the at least one pumping stage and respectively bearing at least one rotor, the at least one rotor being configured to rotate synchronously in opposite directions in the stator and to drive a gas that is to be pumped from a suction inlet of the vacuum pump to a delivery outlet, 
 at least one cooling element coupled to the stator, 
 at least one temperature sensor configured to measure a temperature of the stator, and 
 a controller configured to control the temperature of the stator by means of the at least one cooling element and of the at least one temperature sensor; and 
   the method comprising:
 controlling the temperature of the vacuum pump by means of the at least one cooling element coupled to the stator on the basis of a temperature setpoint and of a measurement of the temperature of the stator, and 
 monitoring whether a value of a parameter indicative of a pumping load, chosen from either a current drawn or a power consumed by the vacuum pump, is below a load threshold and, if the value is below the load threshold, then the temperature setpoint is increased. 
   
     
     
         12 . The method according to  claim 11 , the method further comprising increasing the temperature setpoint at least for control of the temperature of the vacuum pump by means of a cooling element coupled to a low-pressure pumping stage of the vacuum pump. 
     
     
         13 . The method according to  claim 11 , wherein, after the temperature setpoint is increased, the monitoring monitors whether the value is above the load threshold and, if the value is above the load threshold, then an increased temperature setpoint is maintained for a predefined additional length of time. 
     
     
         14 . The method according to  claim 13 , wherein the predefined additional length of time is greater than ten minutes. 
     
     
         15 . The method according to  claim 11 , wherein an increase in the temperature setpoint is greater than 3° C. 
     
     
         16 . The method according to  claim 11 , wherein an increase in the temperature setpoint is less than 20° C. 
     
     
         17 . A vacuum pump of a dry vacuum pump type, comprising:
 a stator;   at least one pumping stage;   two shafts extending into the at least one pumping stage and respectively bearing at least one rotor, the at least one rotor being configured to rotate synchronously in opposite directions in the stator and to drive a gas that is to be pumped from a suction inlet of the vacuum pump to a delivery outlet;   at least one cooling element coupled to the stator;   at least one temperature sensor configured to measure a temperature of the stator; and   a controller configured to
 control the temperature of the stator by means of the at least one cooling element and of the at least one temperature sensor, and 
 implement a temperature control method according to  claim 11 . 
   
     
     
         18 . The vacuum pump according to  claim 17 , wherein the vacuum pump is a rough vacuum pump. 
     
     
         19 . The vacuum pump according to  claim 17 , further comprising two cooling elements coupled to the stator, one cooling element being arranged at each axial end of the vacuum pump. 
     
     
         20 . A vacuum pump system, comprising:
 a chamber; and   a vacuum pump of the dry vacuum pump type according to  claim 17 ,   wherein the vacuum pump is connected to the chamber and configured for pumping in the chamber.